WO2017071861A1 - Capteur de mesure doté d'un conduit de mesure pouvant être excité de manière à produire des vibrations et de nervures de raidissement - Google Patents

Capteur de mesure doté d'un conduit de mesure pouvant être excité de manière à produire des vibrations et de nervures de raidissement Download PDF

Info

Publication number
WO2017071861A1
WO2017071861A1 PCT/EP2016/071197 EP2016071197W WO2017071861A1 WO 2017071861 A1 WO2017071861 A1 WO 2017071861A1 EP 2016071197 W EP2016071197 W EP 2016071197W WO 2017071861 A1 WO2017071861 A1 WO 2017071861A1
Authority
WO
WIPO (PCT)
Prior art keywords
line
measuring
line section
section
stiffening webs
Prior art date
Application number
PCT/EP2016/071197
Other languages
German (de)
English (en)
Inventor
Christof Huber
Patrick REITH
Hagen FETH
Original Assignee
Truedyne Sensors AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Truedyne Sensors AG filed Critical Truedyne Sensors AG
Publication of WO2017071861A1 publication Critical patent/WO2017071861A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8404—Coriolis or gyroscopic mass flowmeters details of flowmeter manufacturing methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
    • G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
    • G01F1/849—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having straight measuring conduits
    • G01F1/8495—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having straight measuring conduits with multiple measuring conduits

Definitions

  • the invention relates to a sensor for measuring at least one measured variable, in particular a density, a flow and / or a viscosity, of a fluid, with at least one measuring line through which the fluid flows in the measuring operation, the at least one excitable to vibrations line section, esp
  • Sensors of this kind are e.g. in industrial metrology for
  • the waveform of the line section may be e.g. be detected by an inlet side and an outlet side arranged on the line section vibration sensor. In that case, those detected by the two vibration sensors
  • At least one measuring line through which the fluid flows in the measuring operation is used, which comprises at least one line section which can be excited to oscillate by means of an exciter device.
  • the resonance frequency is dependent on the density of the flowing fluid and can thus be used to determine the density.
  • MEMS micro-electromechanical systems
  • Silicon based wafers As MEMS trained sensors of o.g. Art are described for example in DE 10 2008 039 045 A1, US 2010/0037706 A1 and US 2002/0194908 A1.
  • Line sections can perform different vibration modes. There is a risk that a useful oscillation mode excited in the measuring mode can overlap other oscillation modes which are referred to below as spurious modes. These spurious modes can e.g. by sources of interference, such as Vibrations on site, are excited and affect the measurement accuracy of these sensors. In this respect, interference modes which correspond to natural mode modes of the line section are particularly critical since they can be excited with comparatively little energy input.
  • the measurement lines must, on the one hand, be sufficiently rigid in order to be able to withstand a pressure prevailing in the interior of the measurement line, and, on the other hand, have to be sufficiently elastic so that the measured variable can have a measurable influence on the resulting Can exercise vibration. Accordingly, the measuring sensitivity of these measuring sensors is greater the more elastic the measuring line is. At the same time, however, the measuring error also increases with increasing elasticity of the measuring line, since the more flexible the measuring line, the more elastic it becomes as a function of a pressure prevailing in the interior of the measuring line. This affects pressure-dependent
  • a deformation of measuring tubes of conventional Coriolis mass flow sensors can be counteracted, for example, in the manner described in EP 012961 19 A1 by equipping the measuring tubes with stiffening rings which enclose the measuring tube on all sides on the outside.
  • stiffening rings which enclose the measuring tube on all sides on the outside.
  • 527 A1 elongated strips of the fiber composite material with anisotropic elasticity on straight pipe sections of the measuring tube so that they run on opposite outer sides of the measuring tube parallel to the longitudinal axis of the pipe section and one of the fiber direction cause corresponding stiffening of the pipe section.
  • the measuring tubes described in US Pat. No. 5,731, 527 A1 are additionally provided with elongate strips of the fiber composite material, which surround the measuring tube in an annular or spiral manner on all sides perpendicular to its longitudinal axis. This measure causes a
  • Both the useful vibration mode and the pressure resistance of the measuring tube increase both measures are required in combination with each other. Accordingly, this increases both the production costs and the mass of the excitable to vibrations line section.
  • Fiber composite exists because of the anisotropic properties of the
  • Fiber composite material and measuring tube the risk that the strips will come off the measuring tube over time. This danger is greater, the greater the ever-changing mechanical load on the connection between the fiber composite material and the measuring tube and the greater the temperature range to which the sensor is exposed.
  • the invention comprises a sensor for measuring at least one
  • Measured variable in particular a density, a flow and / or a viscosity, of a fluid
  • the at least one measuring line through which the fluid flows during the measuring operation, the at least one line section which can be excited to oscillate, in particular a straight line
  • Line section executes vibrations in a predetermined vibration level, which is characterized in that
  • Nutzschwingungsmode extending, in the direction of the longitudinal axis of the line section spaced apart stiffening webs are provided.
  • stiffening webs are arranged in pairs opposite one another, wherein an imaginary between the two stiffening webs of each pair, passing through the line section and the opposite outer sides of the line section extending connecting line perpendicular to the longitudinal axis of the line section and perpendicular to a surface normal the oscillation plane of Nutzschwingungsmode runs.
  • stiffening webs in parallel to the longitudinal axis of the line section extending direction have a land width greater than half of a wall thickness of a conduit wall on which they are arranged and esp. Less than or equal to five times this wall thickness.
  • a third development provides that mutually adjacent stiffening webs parallel to the longitudinal axis of the line section in each case by a distance from each other
  • Verste onlysstege have a material thickness which is greater than or equal to half a wall thickness of a conduit wall on which they are arranged and esp. Less than or equal to five times this wall thickness.
  • a fifth development provides that the stiffening webs in perpendicular to
  • Nutzschwingungsmode extending direction have a ridge height which is less than or equal to a perpendicular to the longitudinal axis of the line section and perpendicular to
  • the line section has a circular or elliptical cross section, and the stiffening webs are seen in cross-section circular segment or sickle-shaped, the stiffening webs esp. Are formed such that they are seen in cross section, ie perpendicular to the longitudinal axis of the line section and perpendicular to the vibration level, on the respective outer side of a center of a Meßrohrmitte angle segment range in the order of 60 ° to 120 ° overlap.
  • a first preferred embodiment provides that the line section in a direction perpendicular to the longitudinal axis of the line section and perpendicular to the vibration plane of the Nutzschwingungsmode extending direction has a height which is greater than its perpendicular thereto extending width. Another embodiment provides that
  • the measuring line comprises two line sections running parallel to one another or two measuring lines are provided, each of which has a line section which can be excited to oscillate and whose line sections are aligned parallel to one another, and
  • the exciter device is designed such that the parallel line section can be excited by them to antiphase oscillations.
  • a second preferred embodiment provides that 10. Sensor according to
  • Claim 1 characterized in that the sensor is designed as MEMS,
  • the measuring line is a microfluidic channel
  • stiffening webs of a material esp. Of silicon or a material of silicon-based, of a metal, in particular a
  • stiffening webs are an integral part of a conduit wall of the conduit section on which they are provided.
  • the pipe section is made of a metal
  • stiffening webs by means of joints on the opposite outer sides of the line section applied stiffening webs, especially soldered, welded or glued, strip-shaped elements, esp. Strip-shaped sheets, are.
  • the measuring line has an inlet, via which the fluid enters the measuring line on the inlet side into the measuring line, and
  • the measuring line has an outlet, via which the fluid exits the measuring line on the outlet side in the measuring mode after flowing through the measuring line,
  • An exciter device is designed such that they in the measuring mode the
  • a measuring device which is designed in such a way that during measurement operation it measures at least one property of the resulting vibration shape of the line section which is dependent on a property, in particular a mass flow, a density or a viscosity, of the fluid flowing through the measuring line during measurement operation and determines the associated measured variable.
  • the invention comprises a method for producing a sensor according to the second preferred embodiment, which is characterized in that
  • the side walls of the shape of the perpendicular to the plane of vibration have extending conduit walls including extending thereon subsegments of the stiffening webs and the bottom of one of the two parallel to
  • a second wafer is connected to the first wafer, from which the not provided by the U-shaped profile parallel to the vibration plane extending channel wall extending on the opposite outer sides thereof
  • the stiffening webs according to the invention have the advantage that they cause both a spurious mode suppression and an increase in the mechanical stability of the cable walls carrying them.
  • Fig. 1 shows: a plan view of a sensor with two straight measuring leads
  • Fig. 2 shows a sectional view of the sensor of Fig. 1;
  • Fig. 3 shows: a plan view of a sensor with a U-shaped measuring line;
  • Fig. 4 shows: a cross-sectional view of the sensor of Fig. 3;
  • FIG. 5 shows a cross section of a line section of a measuring line of FIG
  • FIG. 6 shows a longitudinal section of a line section of a measuring line of FIG
  • Fig. 7 shows: equipped with stiffening webs line section of a
  • Fig. 8 shows: a line section of a measuring tube equipped with crescent-shaped stiffening webs; and Fig. 9 shows: equipped with stiffening webs line section of a measuring tube with an elliptical cross-section.
  • measuring sensors for measuring at least one measured variable, in particular a density, a flow rate and / or a viscosity, of a fluid, in particular of a liquid or a gas, which can be used, which have at least one measuring line 1, 1 'through which the fluid flows during the measuring operation, which has at least one excitable to vibrations, preferably straight, line section 3, and having an excitation device E for exciting a Nutzschwingungsmode, wherein the line section 3 executes vibrations in a predetermined vibration level xy.
  • Fig. 1 shows an embodiment thereof, in which the sensor has two in
  • Flow direction parallel to each other and spatially parallel to each other arranged measuring lines 1 comprises, each comprising a stimulable to vibrations line section 3 and wherein the line sections 3 of the two
  • FIG. 2 shows a cross-sectional view of the measuring sensor of FIG. 1 in the sectional plane A-A 'shown in FIG. 1.
  • FIG. 3 shows a further exemplary embodiment, in which the measuring sensor comprises a single measuring line 1 ', which comprises two line sections 3 which can be excited to oscillate.
  • FIG. 4 shows a sectional drawing of the measuring sensor of FIG. 3 in the sectional plane A-A 'shown in FIG. 3.
  • the measuring line 1 ' has a U-shaped profile in the illustrated plan view, with the two line sections 3, which can be excited to oscillate, each being in the region of the legs of the U-shape and running parallel to one another.
  • Inventive sensors can be designed as conventional sensors.
  • sensors according to the invention can be designed as MEMS. This is the case with the exemplary embodiments illustrated in FIGS. 1 to 4. In that case, the
  • Measuring lines 1, 1 'microfluidic channels and the line sections 3 are
  • the measuring lines 1 are arranged on two support bodies 7 arranged at a distance from each other on a support 5.
  • the opposite ends of the measuring lines 1 are fixed on the respective supporting body 5, and the sections of the measuring lines 1 which are exposed between the two supporting bodies 7 form the line sections 3 which can be excited to oscillate.
  • the free ends of the measuring line 1 ' are arranged on a supporting body 7 arranged on a carrier 5, and a line segment 9 interconnecting the legs of the U-shaped measuring line 1' is on a second one on the carrier 5 mounted support body 7 mounted, which is spaced from the first support body 7.
  • the sections of the measuring line V which are exposed between the two supporting bodies 7 form the line sections 3 which can be excited to oscillate.
  • other forms of arrangement and / or fastening of the channels or channel sections may be provided, which are designed such that a useful oscillation mode can be excited at the respective channel section executes vibrations in a predetermined vibration level.
  • the sensor includes a here shown only schematically
  • vibrational excitation e.g. electrostatic, piezoelectric or magnetic excitation E are used.
  • Corresponding excitation devices are known to the person skilled in the art and therefore not described in detail here.
  • the excitation device E is preferably designed such that it causes a deflection of the straight line sections 3 at both sides of their parallel here to the spatial direction x longitudinal axis extending, wherein the largest
  • Line section 3 occur and remove starting from the middle of the line section 3 in the direction of the fixed ends.
  • the excitation of the Nutzschwingungsmoden the two parallel line sections 3 is preferably carried out in phase opposition.
  • the Nutzschwingungsmoden are indicated in Fig. 1 and 3 respectively by perpendicular to the longitudinal axis of the respective line sections 3 extending double arrows.
  • the useful oscillation mode preferably corresponds to a natural oscillation mode of the respective line section 3.
  • their line sections 3 which can be excited to oscillate for this purpose preferably have two mutually opposite one another parallel to the oscillation plane xy
  • Vibration level x-y extending conduit walls 13. 5 shows a cross section through one of the line sections 3 of the measuring lines 1 and 1 'in the sectional plane B-B' shown in FIGS. 1 and 3. In this orientation of the conduit walls 1 1, 13, each line section 3 due to its shape in addition to the here used as Nutzschwingungsmode
  • Line section 3 substantially identical in shape vibrations in a direction perpendicular to the vibration plane x-y of the Nutzschwingungsmode here by the
  • the measuring lines 1 illustrated in FIGS. 1 and 2 each comprise an inlet 15, via which fluid can enter into the respective measuring line 1, and an outlet 17, via which the fluid can emerge from the respective measuring line 1.
  • the inlets 15 may e.g. via a fed through the carrier 5 and one of the two support body 7 feed line 19, and the outlet side of the measuring lines 1 exiting fluid are each discharged through a leading through the carrier 5 and the other support body 7 derivative 21.
  • the fluid flows through the two measuring lines 1 in parallel in the directions of flow indicated by arrows in FIGS. 1 and 2.
  • the measuring conduit V shown in Figures 3 and 4 comprises an inlet 15, e.g. is supplied via a feed line 19 guided by the carrier 5 and one of the two support bodies 7, and an outlet 21, via which the fluid exiting from the measuring lines 1 'on the outlet side is fed e.g. via a through the support 5 and the same support body 7 leading derivative 21 is discharged.
  • the fluid flows through the two parallel line sections 3 of the measuring line V in opposite directions of flow indicated in FIG. 3 and FIG. 4 by arrows.
  • the measuring transducer comprises a measuring device, which is designed in such a way that, during measuring operation, it has at least one characteristic, dependent on a measured variable to be measured, of the resulting vibration modes of at least one line section 3
  • Measuring methods e.g. the aforementioned Coriolis mass flow measurement and / or the aforementioned Coriolis density measurement can be used.
  • the measuring devices shown here only as a possible example include two vibration sensors S1, S2, of which one is arranged on the inlet side and one on the outlet side on the respective line section 3 for each line section 3 whose resulting vibration is to be detected by measurement.
  • the vibrations detected by the two vibration sensors S1, S2 have matching frequencies corresponding to the resulting vibration shape, which frequencies are mutually dependent on the mass flow through the respective line section 3
  • phase shift are out of phase.
  • usable vibration sensors e.g. Capacitive, piezoelectric or magnetic vibration sensors are known from the prior art and therefore not described in detail here.
  • the sensor may e.g. be used for mass flow measurement by the dependent of the mass flow phase shift determined by means of a not shown here connected to the vibration sensors S1, S2 measuring circuit and from this the mass flow is derived.
  • the sensor can be used for Coriolis density measurement.
  • the line sections 3 are excited by means of the excitation device E to oscillate at a resonant frequency, the density-dependent resonance frequency by means of a not shown, to the vibration sensors S1, S2
  • the Pressure drop corresponds to a difference between a pressure acting on the inlet side and an outlet side in the respective measuring line 1, 1 '.
  • Pressure drop can be detected by means of a measuring sensor 1, 1 'upstream and one of the same measuring line 1, 1' downstream pressure sensor not shown here.
  • Corresponding pressure sensors are described, for example, in US 2002/0194908 A1.
  • the pressure drop is according to the law of Hagen-Poiseuille depending on the product of the mass flow through the respective measuring line 1, 1 'and the kinematic viscosity of the flowing through the measuring line 1, 1' through Fluid. Accordingly, with known pressure drop on the basis of the
  • the kinematic viscosity of the fluid can be determined.
  • the viscosity can also be based on a viscosity-dependent
  • Vibration damping can be determined.
  • a measuring method usable for this purpose is e.g. in EP 01 158289 B1.
  • Inventive sensors are characterized in that they have at least one equipped with stiffening webs 23 to vibrate excitable line section 3.
  • the stiffening webs 23 according to the invention are arranged on two opposite outer sides of the pipe section 3, where they each extend perpendicular to the longitudinal axis of the pipe section 3 and perpendicular to the vibration plane x-y of the useful vibration mode of the pipe section 3.
  • the stiffening webs 23 are therefore located on the opposite outer sides of the line section 3, the surface normal aligned perpendicular to the surface normal to the vibration plane. On the opposite outer sides, the surface normals are aligned parallel to the surface normal to the vibration level, however, no stiffening webs 23 are provided.
  • stiffening webs 23 in the direction of the longitudinal axis of the line section 3 each spaced by a distance d from each other.
  • 6 shows a sectional drawing of one of the line sections 3 of FIGS. 1 and 3 in the sectional plane indicated by C-C in FIGS. 2 and 4.
  • the stiffening webs 23 are preferably arranged in pairs opposite one another, wherein an imaginary between the two stiffening webs 23 of each pair through the line section 3 and the opposite outer sides of the line section 3 extending connecting line perpendicular to the longitudinal axis of the line section 3 and perpendicular to a surface normal to the
  • Vibration level x-y of Nutzschwingungsmode extending deflections of the line section 3 causes, while changing the rigidity of the line section 3 with respect to the Nutzschwingungsmode only to a very small extent.
  • stiffening webs 23 cause a significant increase in the natural frequency of the perpendicular to the Nutzschwingungsmode further
  • the reinforcing webs 23 or increased frequency spacing between these two natural frequencies in terms of the suppression of spurious modes with perpendicular to the vibration plane xy the Nutzschwingungsmode extending vibration components advantage.
  • influences of spurious modes due to the different natural frequencies can be more easily detected and filtered out during the derivation of the measurement signals.
  • This advantage is all the more pronounced, the greater the stiffening of the line section 3 caused by the stiffening webs 23 relative to deflections extending perpendicularly to the oscillation plane xy of the useful oscillation mode.
  • Line section 3 extending land width b of the stiffening webs 23 and the smaller the distances d between along the longitudinal axis of the line section 3 mutually adjacent stiffening webs 23 are. Conversely, however, the influence of the reinforcing webs 23 on the natural frequency of the Nutzschwingungsmode increases with increasing web width b.
  • stiffening webs 23 have the advantage that they have a
  • Line section 3 acting pressures to improve.
  • it can also be used to reduce the wall thickness w of the line section 3 either overall or at least in the region of the outside within certain limits. The smaller the wall thickness w, the lower the mass of the line section 3, which causes an increase in the measuring sensitivity of the sensor in relation to the mass of the fluid flowing through the measuring mode.
  • the Verste onlysstege 23 preferably have a material thickness s which is greater than or equal to half of a wall thickness w of the outer wall on which they are arranged and esp. Less than or equal to five times this wall thickness w. That the wall thickness of the line sections 3 increases in the areas of the stiffening webs 23 around the
  • Line section 3 extending direction preferably a web width b, which is greater than or equal to half the wall thickness w of the conduit wall 13 on which they are arranged and esp. Less than or equal to five times this wall thickness w.
  • the stiffening webs 23 have, in a direction perpendicular to the longitudinal axis of the line section 3 and perpendicular to the vibration plane x-y of the Nutzschwingungsmode extending direction on a web height h, which is less than a perpendicular to the longitudinal axis of the line section 3 and perpendicular to the vibration plane x-y of Nutzschwingungsmode running height H of the line section 3. It is both in terms of caused by the stiffening ribs 23 Störmodenunterdrückung as well as in view of the effect brought about by the stiffening webs 23 increase the mechanical stability of advantage, if web height h as large as possible. For pipe sections 3 with a rectangular or square cross-section, it is preferably equal to the height H of the pipe section 3.
  • the distances d between adjacent reinforcing webs 23 are preferably greater than or equal to the web width b of the reinforcing webs 23 and, in particular, preferably less than or equal to ten times the web width b.
  • the line sections 3 of the microfluidic channels have, for example, perpendicular to their longitudinal axis and perpendicular to the plane of oscillation x-y
  • the conduit walls 1 1, 13 have, for example, a wall thickness w in the order of 10 ⁇ to 100 ⁇ .
  • the wall thickness w is in the range of 20 ⁇ to 60 ⁇ .
  • the line sections 3 may have a height H which is equal to their width B. Preferably, these have
  • Line sections 3 of the microfluidic channels forming the measuring lines 1 and 1 ' e.g. a width B in the order of 150 ⁇ have a height H in the order of 300 ⁇ .
  • the parallel to the vibration plane xy extending line walls 1 1 due to their compared to the height H smaller width B a higher mechanical stability against in the interior of the respective measuring line 1, 1 'acting pressures .
  • the perpendicular to the vibration plane x-y extending conduit walls 13 due to their greater height H are easily deformed.
  • the stiffening webs 23 offer the advantage that they provide a targeted mechanical reinforcement of the easily deformable, perpendicular to the
  • Vibration level x-y extending conduit walls 13 effect.
  • the stiffening webs 23 are preferably made of the material of the pipe section 3 on which they are provided. That offers the advantage that between the
  • thermo-mechanical stresses that could affect the vibration behavior and long-term stability.
  • stiffening webs 23 are preferably formed as integral parts of the conduit walls 1 1, 13 of the conduit section 3 on which they extend. This offers the advantage that for the application of the stiffening webs 23 no joints are required. As a result, the production cost is reduced and increases the long-term stability.
  • measuring lines 1, 1 'designed as microfluidic channels it is preferable to proceed in such a way as to produce in a first wafer a substantially U-shaped profile whose sidewalls define the shape of the conduit walls 13 extending perpendicularly to the plane of oscillation xy extending thereon, shown in Fig. 5 sub-segments 25 of the stiffening webs 23 and the bottom of which forms one of the two parallel to the plane of oscillation xy line walls 1 1.
  • the resulting U-shaped profile can be seen in cross-section in Fig. 5 and in the plan view in Fig. 6.
  • a channel-shaped recess forming the interior of the measuring line 1, 1 ' is produced in the wafer, which in plan view corresponds to the course corresponding to the measuring line 1, V, eg the straight course shown in FIG. 1 or the one shown in FIG -shaped course.
  • the first wafer is connected to a second wafer, from which the not provided by the U-shaped profile, parallel to the vibration plane x-y extending conduit wall 1 1 including extending on the opposite outer sides of the segments 27 of the stiffening webs 23 is generated.
  • the wafer material e.g. Silicon or a silicon-based material.
  • anisotropic etching techniques such as e.g. Reactive Ion Depletion (DRIE).
  • DRIE Reactive Ion Depletion
  • the invention can also be used in conjunction with conventional sensors of the type mentioned in the introduction, which at least one
  • Nutzschwingungsmoden is stimulated, in which the line section 29 performs vibrations in a predetermined vibration level x-y.
  • sensors including excitation equipment usable herein, as well as for metrological detection of the resulting vibrations of the line sections usable
  • Measuring devices are known from the prior art and therefore not described in detail here.
  • FIGS. 7 and 8 each show a cross section of such a line section 29 of a measuring line of a conventional measuring transducer designed as a measuring tube.
  • Line section 29 may be e.g. be provided in a conventional sensor, which has the basic structure of the sensor shown in Fig. 1 with two mutually parallel, in the measuring operation parallel to each other through the fluid flowed measuring lines, the measuring lines each one by means of a
  • the measuring leads are eg at the clamped opposite end of the excitable to vibrations line sections 29, for example by means of a mechanical device.
  • the line sections 29 shown in FIGS. 7 and 8 have a circular-wall-shaped line wall 31 on their opposite outer sides perpendicular to the longitudinal axis of the line section 29 and perpendicular to the
  • stiffening webs 33, 33 ' are provided.
  • the stiffening ribs 33 are as in cross section
  • the stiffening webs 33 ' are formed as cross-sectionally sickle-shaped webs.
  • the stiffening webs 33, 33 ' are preferably made of the same material as the conduit wall 31, e.g. made of metal, e.g. a stainless steel, or a plastic, and are preferably formed as an integral part of the conduit wall 31.
  • the stiffening webs can alternatively also - as shown here - as a separate, preferably made of the material of
  • Conduit 31 may be formed existing components which are applied by means of a joining method on the opposite outer sides of the conduit wall 31. For this they can e.g. soldered in the form of strip-shaped sheets on the outside, welded or glued.
  • Stiffening webs 33, 33 ' is also here as large as possible, but with regard to the desired spurious suppression in line sections 29 conventional
  • Measuring tubes preferably is really smaller than the height H of the line section 29.
  • both the interference suppression caused by the stiffening webs 33, 33 'and the increase in mechanical stability caused by stiffening webs 33, 33' can be additionally improved by the line section 35 in perpendicular to its longitudinal axis and perpendicular to the plane of oscillation xy of Nutzschwingungsmode extending direction has a height H, which is greater than its perpendicular width B thereof.
  • line sections 29 of FIGS. 7 and 8 it is possible, for example, to use line sections 35 with a line wall 37 which is elliptical in cross-section and shown in FIG.
  • the other embodiments of FIGS. 7 and 8 apply equally to the embodiment shown in FIG. 9.

Abstract

L'invention concerne un capteur de mesure destiné à mesurer au moins une grandeur de mesure, en particulier une densité, un débit et/ou une viscosité d'un fluide, comprenant au moins un conduit de mesure (1, 1') traversé par le fluide lors du fonctionnement de mesure, lequel conduit de mesure comprend au moins une partie de conduit (3, 29, 35) pouvant être excitée de manière à produire des vibrations, en particulier une partie de conduit rectiligne (3, 29, 35), et comprenant un dispositif d'excitation (E) pour l'excitation d'un mode de vibrations utiles dans lequel la partie de conduit (3, 29, 35) effectue des vibrations dans un plan de vibration (x-y) prédéfini. Selon l'invention, même en cas de durée de fonctionnement prolongée, une grande stabilité mécanique de la partie de conduit (3, 29, 35) et une suppression efficace de mode parasite sont obtenues, par le fait que, sur des côtés extérieurs opposés de la partie de conduit (3, 29, 35), des nervures de raidissement (23, 33, 33') espacées les unes des autres dans la direction de l'axe longitudinal de la partie de conduit (3, 29) et s'étendant perpendiculairement à un axe longitudinal de la partie de conduit (3, 29, 35) et perpendiculairement au plan de vibration (x-y) du mode de vibrations utiles sont prévues.
PCT/EP2016/071197 2015-10-27 2016-09-08 Capteur de mesure doté d'un conduit de mesure pouvant être excité de manière à produire des vibrations et de nervures de raidissement WO2017071861A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015118347.1A DE102015118347A1 (de) 2015-10-27 2015-10-27 Messaufnehmer mit einer zu Schwingungen anregbaren Messleitung
DE102015118347.1 2015-10-27

Publications (1)

Publication Number Publication Date
WO2017071861A1 true WO2017071861A1 (fr) 2017-05-04

Family

ID=56893974

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2016/071197 WO2017071861A1 (fr) 2015-10-27 2016-09-08 Capteur de mesure doté d'un conduit de mesure pouvant être excité de manière à produire des vibrations et de nervures de raidissement

Country Status (2)

Country Link
DE (1) DE102015118347A1 (fr)
WO (1) WO2017071861A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112105896A (zh) * 2017-12-05 2020-12-18 通用电气健康护理生物科学股份公司 用于科里奥利流量感测组合件的接口

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10422678B2 (en) * 2017-12-05 2019-09-24 General Electric Company Coriolis flow sensor assembly
DE102021126715A1 (de) 2021-10-14 2023-04-20 Endress+Hauser Flowtec Ag Coriolis-Massedurchflussmessaufnehmer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5373745A (en) * 1991-02-05 1994-12-20 Direct Measurement Corporation Single path radial mode Coriolis mass flow rate meter
US20110146416A1 (en) * 2009-03-11 2011-06-23 Endress + Hauser Flowtec Ag Measuring transducer of vibration-type, as well as an in-line measuring device having such a measuring transducer

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5448921A (en) * 1991-02-05 1995-09-12 Direct Measurement Corporation Coriolis mass flow rate meter
US5731527A (en) 1996-09-20 1998-03-24 Micro Motion, Inc. Coriolis flowmeters using fibers and anisotropic material to control selected vibrational flowmeter characteristics
EP1340972B1 (fr) 2000-04-27 2019-07-17 Endress + Hauser Flowtec AG Appareil de mesure par vibration et méthode de mesure de viscosité d'un fluide
US6647778B2 (en) 2001-06-20 2003-11-18 Integrated Sensing Systems Integrated microtube sensing device
US6415668B1 (en) * 2001-07-23 2002-07-09 Fmc Technologies, Inc. De-coupling extraneous modes of vibration in a coriolis mass flowmeter
EP1296119A1 (fr) 2001-09-21 2003-03-26 Endress + Hauser Flowtec AG Capteur de mesure du type vibrant
US7059176B2 (en) * 2003-06-18 2006-06-13 Integrated Sensing Systems, Inc. Resonant tube viscosity sensing device
US20090075129A1 (en) * 2004-12-27 2009-03-19 Integrated Sensing Systems, Inc. Microfluidic device and method of use
WO2009102796A1 (fr) 2008-02-11 2009-08-20 Integrated Sensing Systems, Inc. Dispositif microfluidique et procédés d’utilisation et de fabrication
DE102008002217A1 (de) * 2008-06-04 2009-12-10 Endress + Hauser Flowtec Ag Vorrichtung zur Bestimmung und/oder Überwachung eines Strömungsparameters
DE102008039045A1 (de) 2008-08-21 2010-02-25 Endress + Hauser Flowtec Ag Sensor in mikromechanischer Bauweise

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5373745A (en) * 1991-02-05 1994-12-20 Direct Measurement Corporation Single path radial mode Coriolis mass flow rate meter
US20110146416A1 (en) * 2009-03-11 2011-06-23 Endress + Hauser Flowtec Ag Measuring transducer of vibration-type, as well as an in-line measuring device having such a measuring transducer
US20130133436A1 (en) * 2009-03-11 2013-05-30 Endress + Hauser Flowtec Ag Measuring system for media flowing in a pipeline

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112105896A (zh) * 2017-12-05 2020-12-18 通用电气健康护理生物科学股份公司 用于科里奥利流量感测组合件的接口
CN112105896B (zh) * 2017-12-05 2024-02-27 思拓凡瑞典有限公司 用于科里奥利流量感测组合件的接口

Also Published As

Publication number Publication date
DE102015118347A1 (de) 2017-04-27

Similar Documents

Publication Publication Date Title
EP3368867B1 (fr) Capteur mems pour la mesure d'au moins une grandeur mesurable d'un fluide
EP2406590B1 (fr) Capteur de mesure à vibration et instrument de mesure en ligne muni d'un tel capteur de mesure
DE102010035341B4 (de) Verfahren zur Bestimmung der Viskosität eines Mediums mit einem Coriolis-Massedurchflussmessgerät
DE102010047241B4 (de) Coriolis-Massedurchflussmessgerät
WO2010102999A1 (fr) Capteur de mesure à vibration et instrument de mesure en ligne muni d'un tel capteur de mesure
DE102015110711A1 (de) MEMS Sensor zu Messung mindestens einer Messgröße eines strömenden Fluids
WO2017071861A1 (fr) Capteur de mesure doté d'un conduit de mesure pouvant être excité de manière à produire des vibrations et de nervures de raidissement
EP2316005A1 (fr) Capteur de conception micromécanique
WO2012031842A1 (fr) Procédé de détection d'un engorgement dans un débitmètre à effet coriolis
DE102017125271A1 (de) Massedurchflussmessgerät nach dem Coriolis-Prinzip mit mindestens zwei Messrohrpaaren
DE102009055069A1 (de) Meßaufnehmer vom Vibrationstyp
DE102020111127A1 (de) Verfahren zum Überwachen eines Coriolis-Massedurchflussmessaufnehmers
EP3977063B1 (fr) Transducteur de type à vibration et système de mesure vibronique le comprenant
EP1825230A1 (fr) Capteur de mesure du type a vibrations
EP3729010A1 (fr) Transduction de type à vibration et système de mesure vibronique associé
DE102009046043A1 (de) Messwandler vom Vibrationstyp
DE4441225C2 (de) Massendurchfluß-Meßgerät
EP3732448B1 (fr) Instrument de mesure du type à vibrations muni d'un tube de mesure
DE4121732A1 (de) Messgeraet zur erfassung eines massendurchflusses nach dem coriolis-prinzip
EP1421349B1 (fr) Capteur de débit de fluide du type vibrant
WO2018114198A1 (fr) Enregistreur de mesure de type à vibrations destiné à mesurer la densité et/ou le débit massique d'un fluide en écoulement
EP1223412B1 (fr) Débitmètre massique de Coriolis monotubulaire courbé avec dispositif d'excitation symétrique
EP3910297B1 (fr) Procédé d'excitation sélective de mode d'une onde guidée et dispositif de mesure
EP0142560B1 (fr) Corps cylindrique creux pour transducteur de mesure servant a mesurer la pression d'un fluide
DE102010043708A1 (de) Messwandler vom Vibrationstyp mit mindestens zwei Schwingungssystemen

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16763256

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16763256

Country of ref document: EP

Kind code of ref document: A1