WO2008039116A1 - Medical implantable piezoelectric sensor and method for manufacturing the same - Google Patents

Medical implantable piezoelectric sensor and method for manufacturing the same Download PDF

Info

Publication number
WO2008039116A1
WO2008039116A1 PCT/SE2006/001101 SE2006001101W WO2008039116A1 WO 2008039116 A1 WO2008039116 A1 WO 2008039116A1 SE 2006001101 W SE2006001101 W SE 2006001101W WO 2008039116 A1 WO2008039116 A1 WO 2008039116A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric
layers
sensor
medical implantable
piezoelectric sensor
Prior art date
Application number
PCT/SE2006/001101
Other languages
French (fr)
Inventor
Sven-Erik Hedberg
Kenth Nilsson
Original Assignee
St. Jude Medical Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St. Jude Medical Ab filed Critical St. Jude Medical Ab
Priority to PCT/SE2006/001101 priority Critical patent/WO2008039116A1/en
Publication of WO2008039116A1 publication Critical patent/WO2008039116A1/en

Links

Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/02Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
    • A61B5/021Measuring pressure in heart or blood vessels
    • A61B5/0215Measuring pressure in heart or blood vessels by means inserted into the body
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/02Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
    • A61B5/02007Evaluating blood vessel condition, e.g. elasticity, compliance
    • A61B5/02014Determining aneurysm
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/30Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302Sensors

Definitions

  • the present invention relates to a medical implantable piezoelectric sensor comprising a piezoelectric layer and an electrode layer on each side of the piezoelectric layer.
  • the invention also relates to a method for manufacturing of a medical implantable piezoelectric sensor.
  • a piezoelectric element or sensor For monitoring pressure inside the body, e.g. blood pressure inside a heart or a blood vessel, it is common practice to use a piezoelectric element or sensor, which is inserted into the organ to be monitored.
  • the dimensions of the piezoelectric sensors have to be reduced. This may cause problems since the electrical charge generated by the piezoelectric sensor is directly proportional to the surface area of the piezoelectric material. In other words, the electric signals from the sensor will be reduced as the surface area of the piezoelectric material becomes smaller and this will put high demands on the electronic equipment to handle small signals and a small signal is also prone to interference and disturbance. Accordingly, there exists a need for a piezoelectric sensor, which can give an adequate signal level and still be miniaturized to fit the equipment to be implanted.
  • the invention also relates to a method for manufacturing a piezoelectric sensor, having essentially the same object as above. At least this object can be achieved by a method according to claim 12.
  • the invention is thus based on the understanding that the above object may be achieved by a piezoelectric sensor having two or more piezoelectric layers placed one over another and separated by separating layers comprising electrode layers between the piezoelectric layers.
  • a piezoelectric sensor having two or more piezoelectric layers placed one over another and separated by separating layers comprising electrode layers between the piezoelectric layers.
  • the piezoelectric sensor By arranging the piezoelectric sensor in two or more layers, it is possible to increase the sensor area, without significantly increasing the overall sensor dimensions.
  • This can be achieved by utilizing a film technique to build up the sensor.
  • the sensor film thickness including a piezoelectric layer and metallization, i.e. electrode layers can by modern film technique, be limited to less than 10 micrometers.
  • the sensor can be built up by depositing the layers onto each other in which case the layers can be made very thin and the manufacturing costs will be very low. Accordingly, this invention provides techniques to build smaller sensors, which in many cases is necessary to be able to
  • each piezoelectric layer can be provided with separate electrode layers on each side of the piezoelectric layer, in which case the piezoelectric layers can be separated by an insulating layer between adjacent electrode layers.
  • the piezoelectric layers are electrically connected in parallel to each other.
  • a further advantage with a multilayer piezoelectric sensor connected in parallel, is that it easily can be made electrically shielded. If namely, the lower electrode layer of the lower piezoelectric layer and the upper electrode layer of the upper piezoelectric layer are interconnected and attached to ground potential, the sensor will be shielded. However, this requires that the sensor contains an even number of layers. The shielding will protect the sensor from external electrical fields, which is advantageous in terms of reduced interference from other signals. With conventional sensors it is very difficult or even impossible to accomplish an electrical shielding to a reasonable cost without deteriorating the performance of the sensor or increasing the overall dimensions .
  • a first piezoelectric layer is provided, having a first and second electrode layer on each side.
  • a second piezoelectric layer is deposited on top of the second electrode layer and subsequently a third electrode layer is deposited on top of the second piezoelectric layer.
  • a possible third and further piezoelectric layer is then deposited in the same way until the desired number of layers have been obtained. This will result in a twofold, threefold...etc, increase of the sensor area, and hence of the sensor signal, at the minor cost of less than 100 micrometers and preferably less than 10 micrometers increase in total film thickness for each layer.
  • the sensor can be separately built up and subsequently mounted, e.g.
  • the senor is built up on the outside of a tubular element such that the sensor itself will have a tubular form, preferably cylindrical.
  • the invention offers a possibility to increase the piezoelectric area, while at the same time reduce the overall dimensions of the sensor.
  • One advantage associated with a larger sensor area is that the output impedance of the sensor is lowered due to increasing capacitance. The higher the capacitance the more electrical leakage can be tolerated in e.g. a pacemaker lead. A higher capacitance will also protect the sensor from damage due to defibrillator shocks. Furthermore, since the sensor will become much smaller, the risk of physical damage during production and in clinical use, will be smaller than for a conventional sensor.
  • Fig 1 is a perspective view of a first embodiment of the invention
  • Fig 2 is a perspective view of a second embodiment of the invention
  • Fig 3 is a cut perspective view of a third embodiment of the invention.
  • Fig 4 is a longitudinal section through the embodiment according to fig 3.
  • the sensor comprises two piezoelectric layers Ia, Ib of which one Ib is located over the other Ia.
  • the sensor also comprises two electrical electrodes, namely one first electrode 2 and one second electrode 3.
  • the first electrode 2 comprises two electrode layers 2a and 2b and encloses the sensor on three of the outer surfaces, namely a lower and an upper surface as well as a side surface.
  • the second electrode 3 is positioned on a side surface on the other of the sensor side surfaces and comprises one electrode layer 3a, which is located between the piezoelectric layers Ia and Ib.
  • the electrodes 2 and 3 is completely electrically separated from each other such that when the sensor is exposed to pressure, the electrodes will obtain different electrical potential, which can be measured by means of any suitable device.
  • a similar piezoelectric sensor is illustrated in fig 2.
  • the sensor comprises four piezoelectric layers la-Id.
  • the electrode 2 is provided with one additional electrode layer 2c located between the piezoelectric layers Ib and Ic.
  • the electrode 3 is provided with one additional electrode layer 3b located between the piezoelectric layers Ic and Id.
  • this sensor is electrically shielded in that the electrode 2 encloses the sensor on three outer surfaces by means of the electrode layers 2a and 2b and on a side surface, wherein the electrode 2 preferably is connected to ground potential during operation.
  • fig 3 and 4 is illustrated an alternative embodiment of the invention in a cut perspective view and a longitudinal section, respectively.
  • the senor is applied onto a substrate in form of a cylindrical tube 4.
  • the tube 4 can preferably constitute a part of a medical implantable lead, e.g. a so called header tube arranged in a distal end of a pacemaker lead.
  • the number of piezoelectric layers Ia-Ic are three and they are arranged around the circumference of the tube.
  • the detailed arrangement of the sensor is illustrated.
  • both the first electrode 2 and the second electrode 3 has one layer, 2a and 3a respectively, applied onto the outside surface of the tube 4. However, these two layers are not in electrical contact with each other. Instead a gap 5 is provided between the two layers and the tube is made of an electrically non-conducting material.
  • the electrode 3 comprises one electrode layer 3c on the outer piezoelectric layer Ic of the sensor as well as one electrode layer 3b between the piezoelectric layers Ia and Ib.
  • the electrode layer 2a of the electrode 2 is located between the tube 4 and the first piezoelectric layer Ia and extended under almost the entire length of the piezoelectric layer Ia except in the area of the gap 5.
  • the electrode 2 has one more electrode layer 2b located between the piezoelectric layers Ib and Ic.
  • the embodiment according to fig 3 and 4 offers a rigid and robust sensor structure with a very large total sensor area, which preferably can be made to add less than 20 micrometer increase of the tube diameter for each piezoelectric layer.
  • this embodiment is not electrically shielded. This is due to the fact that in this embodiment there is no common electrode enclosing the sensor on the lower as well as the upper surface, which could be connected to e.g. ground potential. However, it would be a simple task to accomplish a shielding also here, e.g. by arranging one more piezoelectric layer covered by an electrode layer from the electrode 2.

Abstract

The invention relates to a medical implantable piezoelectric sensor comprising a piezoelectric layer and an electrode layer on each side of the piezoelectric layer. The piezoelectric sensor is formed of two or more piezoelectric layers (Ia-Ic) being arranged one over another and having separating layers, comprising electrode layers (2a-2b, 3a-3c) , between the piezoelectric layers. The invention also relates to a method for manufacturing such a piezoelectric sensor.

Description

MEDICAL IMPLANTABLE PIEZOELECTRIC SENSOR AND METHOD FOR
MANUFACTURING THE SAME
The present invention relates to a medical implantable piezoelectric sensor comprising a piezoelectric layer and an electrode layer on each side of the piezoelectric layer. The invention also relates to a method for manufacturing of a medical implantable piezoelectric sensor.
Background of the invention The development of medical implantable devices goes towards reduced dimensions. The reasons for this are e.g. that smaller devices are easier to insert and more comfortable for a person to use. Examples of such devices or equipment are implantable medical leads for pacemaker applications. However, it could also be other kinds of equipment, such as leads or devices for regulating and/or monitoring the function of any other arbitrary organ inside a human or animal body.
For monitoring pressure inside the body, e.g. blood pressure inside a heart or a blood vessel, it is common practice to use a piezoelectric element or sensor, which is inserted into the organ to be monitored. However, due to the reduction of the overall dimensions of the medical implantable devices, also the dimensions of the piezoelectric sensors have to be reduced. This may cause problems since the electrical charge generated by the piezoelectric sensor is directly proportional to the surface area of the piezoelectric material. In other words, the electric signals from the sensor will be reduced as the surface area of the piezoelectric material becomes smaller and this will put high demands on the electronic equipment to handle small signals and a small signal is also prone to interference and disturbance. Accordingly, there exists a need for a piezoelectric sensor, which can give an adequate signal level and still be miniaturized to fit the equipment to be implanted.
Summary of the invention
It is an object of the invention to overcome the drawbacks of prior art piezoelectric sensors and provide a piezoelectric sensor, which can be miniaturized and still provide an adequate signal level. At least this object can be achieved by a piezoelectric sensor according to claim 1.
The invention also relates to a method for manufacturing a piezoelectric sensor, having essentially the same object as above. At least this object can be achieved by a method according to claim 12.
The invention is thus based on the understanding that the above object may be achieved by a piezoelectric sensor having two or more piezoelectric layers placed one over another and separated by separating layers comprising electrode layers between the piezoelectric layers. By arranging the piezoelectric sensor in two or more layers, it is possible to increase the sensor area, without significantly increasing the overall sensor dimensions. This can be achieved by utilizing a film technique to build up the sensor. For example, the sensor film thickness including a piezoelectric layer and metallization, i.e. electrode layers, can by modern film technique, be limited to less than 10 micrometers. Preferably, the sensor can be built up by depositing the layers onto each other in which case the layers can be made very thin and the manufacturing costs will be very low. Accordingly, this invention provides techniques to build smaller sensors, which in many cases is necessary to be able to reduce the overall dimensions of the medical implantable device, such as a lead.
While in most cases there is preferred to use as thin film layers as possible, e.g. less than 10 micrometers, it is of course also conceivable to use film layers having a larger thickness. E.g. in many cases there would be possible to use film layers of up to 100 micrometers without any particular disadvantage. Within this general inventive idea, the sensor can be formed in many different ways. For example, each piezoelectric layer can be provided with separate electrode layers on each side of the piezoelectric layer, in which case the piezoelectric layers can be separated by an insulating layer between adjacent electrode layers. However, in a preferred embodiment, the piezoelectric layers are electrically connected in parallel to each other. This can easily be achieved by arranging only one electrode layer between two successive piezoelectric layers and to connect successive electrode layers to different electrical potential and every second electrode layer to the same electrical potential. In this way it is possible to dispense with any insulating layers between electrode layers associated with adjacent piezoelectric layers, which is advantageous in terms of reduced thickness and costs for material and depositing or any other manufacturing step.
A further advantage with a multilayer piezoelectric sensor connected in parallel, is that it easily can be made electrically shielded. If namely, the lower electrode layer of the lower piezoelectric layer and the upper electrode layer of the upper piezoelectric layer are interconnected and attached to ground potential, the sensor will be shielded. However, this requires that the sensor contains an even number of layers. The shielding will protect the sensor from external electrical fields, which is advantageous in terms of reduced interference from other signals. With conventional sensors it is very difficult or even impossible to accomplish an electrical shielding to a reasonable cost without deteriorating the performance of the sensor or increasing the overall dimensions . In a method for manufacturing a multilayer piezoelectric sensor connected in parallel, a first piezoelectric layer is provided, having a first and second electrode layer on each side. Next, a second piezoelectric layer is deposited on top of the second electrode layer and subsequently a third electrode layer is deposited on top of the second piezoelectric layer. A possible third and further piezoelectric layer is then deposited in the same way until the desired number of layers have been obtained. This will result in a twofold, threefold...etc, increase of the sensor area, and hence of the sensor signal, at the minor cost of less than 100 micrometers and preferably less than 10 micrometers increase in total film thickness for each layer. The sensor can be separately built up and subsequently mounted, e.g. by adhesive bonding, on the medical implantable equipment. However, preferably it is built up on some kind of substrate, e.g. a rigid plate or directly onto some portion of the medical implantable equipment, for enhanced strength and ease of manufacturing. In a hereinafter shown and more in detail described embodiment, the sensor is built up on the outside of a tubular element such that the sensor itself will have a tubular form, preferably cylindrical. The invention offers a possibility to increase the piezoelectric area, while at the same time reduce the overall dimensions of the sensor. One advantage associated with a larger sensor area, is that the output impedance of the sensor is lowered due to increasing capacitance. The higher the capacitance the more electrical leakage can be tolerated in e.g. a pacemaker lead. A higher capacitance will also protect the sensor from damage due to defibrillator shocks. Furthermore, since the sensor will become much smaller, the risk of physical damage during production and in clinical use, will be smaller than for a conventional sensor. Brief description of the drawings
The invention will now be described by way of example with reference to the accompanying drawings, in which: Fig 1 is a perspective view of a first embodiment of the invention; Fig 2 is a perspective view of a second embodiment of the invention;
Fig 3 is a cut perspective view of a third embodiment of the invention; and
Fig 4 is a longitudinal section through the embodiment according to fig 3.
Detailed description of embodiments of the invention Reference is first made to fig 1, in which is illustrated, in a perspective view in an enlarged scale, a plate formed piezoelectric sensor, according to the invention, having two piezoelectric layers. The sensor comprises two piezoelectric layers Ia, Ib of which one Ib is located over the other Ia. The sensor also comprises two electrical electrodes, namely one first electrode 2 and one second electrode 3. The first electrode 2 comprises two electrode layers 2a and 2b and encloses the sensor on three of the outer surfaces, namely a lower and an upper surface as well as a side surface. The second electrode 3 is positioned on a side surface on the other of the sensor side surfaces and comprises one electrode layer 3a, which is located between the piezoelectric layers Ia and Ib. The electrodes 2 and 3 is completely electrically separated from each other such that when the sensor is exposed to pressure, the electrodes will obtain different electrical potential, which can be measured by means of any suitable device.
A similar piezoelectric sensor is illustrated in fig 2. However, here the sensor comprises four piezoelectric layers la-Id. For this reason, the electrode 2 is provided with one additional electrode layer 2c located between the piezoelectric layers Ib and Ic. Also the electrode 3 is provided with one additional electrode layer 3b located between the piezoelectric layers Ic and Id. As with the sensor according to fig 1, this sensor is electrically shielded in that the electrode 2 encloses the sensor on three outer surfaces by means of the electrode layers 2a and 2b and on a side surface, wherein the electrode 2 preferably is connected to ground potential during operation. In fig 3 and 4 is illustrated an alternative embodiment of the invention in a cut perspective view and a longitudinal section, respectively. In this embodiment, the sensor is applied onto a substrate in form of a cylindrical tube 4. The tube 4 can preferably constitute a part of a medical implantable lead, e.g. a so called header tube arranged in a distal end of a pacemaker lead. Here the number of piezoelectric layers Ia-Ic are three and they are arranged around the circumference of the tube. In fig 4 the detailed arrangement of the sensor is illustrated. As can be seen, both the first electrode 2 and the second electrode 3 has one layer, 2a and 3a respectively, applied onto the outside surface of the tube 4. However, these two layers are not in electrical contact with each other. Instead a gap 5 is provided between the two layers and the tube is made of an electrically non-conducting material. Moreover, the electrode 3 comprises one electrode layer 3c on the outer piezoelectric layer Ic of the sensor as well as one electrode layer 3b between the piezoelectric layers Ia and Ib. The electrode layer 2a of the electrode 2 is located between the tube 4 and the first piezoelectric layer Ia and extended under almost the entire length of the piezoelectric layer Ia except in the area of the gap 5. In addition, the electrode 2 has one more electrode layer 2b located between the piezoelectric layers Ib and Ic. The embodiment according to fig 3 and 4, offers a rigid and robust sensor structure with a very large total sensor area, which preferably can be made to add less than 20 micrometer increase of the tube diameter for each piezoelectric layer. One difference with this embodiment by comparison with the embodiments according to fig 1 and 2, is that this embodiment is not electrically shielded. This is due to the fact that in this embodiment there is no common electrode enclosing the sensor on the lower as well as the upper surface, which could be connected to e.g. ground potential. However, it would be a simple task to accomplish a shielding also here, e.g. by arranging one more piezoelectric layer covered by an electrode layer from the electrode 2.

Claims

1. Medical implantable piezoelectric sensor comprising a piezoelectric layer and an electrode layer on each side of the piezoelectric layer, c h a r a c t e r i z e d in that the piezoelectric sensor is formed of two or more piezoelectric layers (Ia-Ic) being arranged one over another and having separating layers, comprising electrode layers (2a-2c, 3a-3c) , between the piezoelectric layers.
2. Medical implantable piezoelectric sensor according to claim 1, c h a r a c t e r i z e d in that each piezoelectric layer including electrode layers, adds less than 100 micrometers in total thickness to the sensor.
3. Medical implantable piezoelectric sensor according to claim 1, c h a r a c t e r i z e d in that each piezoelectric layer including electrode layers, adds less than 10 micrometers in total thickness to the sensor.
4. Medical implantable piezoelectric sensor according to any of the preceding claims, c h a r a c t e r i z e d in that the piezoelectric layers being electrically connected in parallel.
5. Medical implantable piezoelectric sensor according to claim 4, c h a r a c t e r i z e d in that successive electrode layers have different electrical potential.
6. Medical implantable piezoelectric sensor according to any of the preceding claims, c h a r a c t e r i z e d in that the piezoelectric layers are arranged in a tubular form.
7. Medical implantable piezoelectric sensor according to claim 6, c h a r a c t e r i z e d in that the tubular piezoelectric layers are arranged on a tubular substrate (4) .
8. Medical implantable piezoelectric sensor according to claim 7, c h a r a c t e r i z e d in that the tubular substrate (4) as well as the tubular piezoelectric layers have a cylindrical shape.
9. Medical implantable piezoelectric sensor according to any of the claims 1-5, c h a r a c t e r i z e d in that the piezoelectric layers are arranged in a flat form.
10. Medical implantable piezoelectric sensor according to claim 9, c h a r a c t e r i z e d in that the tubular piezoelectric layers are arranged on a flat substrate.
11. Medical implantable piezoelectric sensor according to any of the preceding claims, c h a r a c t e r i z e d in that a common electrode layer (2) covers the piezoelectric sensor on a lower as well as an upper surface and is connectible to ground potential to obtain electrical shielding of the sensor.
12. Method for manufacturing a medical implantable piezoelectric sensor, comprising the steps of: providing a piezoelectric film or sheet; and arranging at least two piezoelectric layers (la-Id) of films or sheets one over another with separating layers, comprising electrode layers (2a-2c, 3a-3c) , between the piezoelectric layers.
13. Method according to claim 12, comprising the further step of: applying successive layers by means of depositing.
14. Method according to claim 12 or 13, comprising the further step of: electrically connecting the piezoelectric layers in parallel .
15. Method according to claim 14, comprising the further step of: electrically connecting successive electrodes to different electrical potential.
16. Method according to any of the preceding claims
12-15, comprising the further step of: applying a common electrode layer (2) around the sensor which is connectible to ground potential to obtain electrical shielding of the sensor.
17. Method according to any of the preceding claims
12-16, comprising the further step of: arranging the piezoelectric layers on a tubular substrate
(4) .
PCT/SE2006/001101 2006-09-28 2006-09-28 Medical implantable piezoelectric sensor and method for manufacturing the same WO2008039116A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/SE2006/001101 WO2008039116A1 (en) 2006-09-28 2006-09-28 Medical implantable piezoelectric sensor and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SE2006/001101 WO2008039116A1 (en) 2006-09-28 2006-09-28 Medical implantable piezoelectric sensor and method for manufacturing the same

Publications (1)

Publication Number Publication Date
WO2008039116A1 true WO2008039116A1 (en) 2008-04-03

Family

ID=39230435

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SE2006/001101 WO2008039116A1 (en) 2006-09-28 2006-09-28 Medical implantable piezoelectric sensor and method for manufacturing the same

Country Status (1)

Country Link
WO (1) WO2008039116A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110352082A (en) * 2016-12-30 2019-10-18 索林Crm联合股份公司 Autonomous implantable capsule for cardiac stimulation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010026111A1 (en) * 1997-12-30 2001-10-04 Remon Medical Technologies Ltd. Acoustic biosensor for monitoring physiological conditions in a body implantation site
WO2002041130A2 (en) * 2000-11-16 2002-05-23 David Hudson Keyboard display
US20030114966A1 (en) * 2001-12-14 2003-06-19 Ferguson Alan L. System and method for remotely monitoring the condition of machine
US6585763B1 (en) * 1997-10-14 2003-07-01 Vascusense, Inc. Implantable therapeutic device and method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6585763B1 (en) * 1997-10-14 2003-07-01 Vascusense, Inc. Implantable therapeutic device and method
US20010026111A1 (en) * 1997-12-30 2001-10-04 Remon Medical Technologies Ltd. Acoustic biosensor for monitoring physiological conditions in a body implantation site
WO2002041130A2 (en) * 2000-11-16 2002-05-23 David Hudson Keyboard display
US20030114966A1 (en) * 2001-12-14 2003-06-19 Ferguson Alan L. System and method for remotely monitoring the condition of machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110352082A (en) * 2016-12-30 2019-10-18 索林Crm联合股份公司 Autonomous implantable capsule for cardiac stimulation
CN110352082B (en) * 2016-12-30 2023-06-23 索林Crm联合股份公司 Autonomous implantable capsule for cardiac stimulation

Similar Documents

Publication Publication Date Title
EP2535083B1 (en) A filtering assembly and a feedthrough assembly
WO2008134615A2 (en) Metallization with tailorable coefficient of thermal expansion
EP1976428B1 (en) Media-exposed interconnects for transducers
US8849424B2 (en) Integrated conductive sensor package having conductor bypass, distal electrode, distal adapter and custom molded overlay
US20120197155A1 (en) Implantable Capacitive Pressure Sensor Apparatus and Methods Regarding Same
EP2130495A1 (en) Ultrasonic probe and method for manufacturing the same and ultrasonic diagnostic device
US10539475B2 (en) Stretch sensor with an improved flexible interconnect
EP1331877A1 (en) A piezoelectric sensor in a living organism for fluid pressure measurement.
US8626313B2 (en) Piezoelectric sensor, a method for manufacturing a piezoelectric sensor and a medical implantable lead comprising such a piezoelectric sensor
WO2015127319A1 (en) Filtered feedthrough assembly for implantable medical electronic devices
EP2841155B1 (en) Implantable device with chassis element
JP7237954B2 (en) Mass production of catheters containing electrodes with low impedance at low frequencies
US8461681B2 (en) Layered structure for corrosion resistant interconnect contacts
FI128328B (en) A force and/or pressure sensor with at least two layers of electrodes
WO2008039116A1 (en) Medical implantable piezoelectric sensor and method for manufacturing the same
US9763622B2 (en) Sensor element with an insulation layer
US8172760B2 (en) Medical device encapsulated within bonded dies
US20110028852A1 (en) Implantable Pressure Sensor with Membrane Bridge
WO2021181083A1 (en) Pressure sensor
JP2000287298A (en) Method and element for acoustic emission detection

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 06799702

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 06799702

Country of ref document: EP

Kind code of ref document: A1