WO2003072486A3 - Mems devices and methods of manufacture - Google Patents

Mems devices and methods of manufacture Download PDF

Info

Publication number
WO2003072486A3
WO2003072486A3 PCT/US2003/004440 US0304440W WO03072486A3 WO 2003072486 A3 WO2003072486 A3 WO 2003072486A3 US 0304440 W US0304440 W US 0304440W WO 03072486 A3 WO03072486 A3 WO 03072486A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems
fabrication
actuable element
methods
substrate
Prior art date
Application number
PCT/US2003/004440
Other languages
French (fr)
Other versions
WO2003072486A2 (en
Inventor
Hirokazu Tamura
Matthew J Neal
Akira Mugino
Justin C Borski
Alan L Sidman
Jiang Zhe
Original Assignee
Advanced Microsensors
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/079,985 external-priority patent/US6717227B2/en
Priority claimed from US10/309,951 external-priority patent/US6858911B2/en
Priority claimed from US10/309,964 external-priority patent/US6900510B2/en
Application filed by Advanced Microsensors filed Critical Advanced Microsensors
Priority to AU2003215222A priority Critical patent/AU2003215222A1/en
Publication of WO2003072486A2 publication Critical patent/WO2003072486A2/en
Publication of WO2003072486A3 publication Critical patent/WO2003072486A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3552—1x1 switch, e.g. on/off switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3594—Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F2007/068—Electromagnets; Actuators including electromagnets using printed circuit coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures
    • H01F7/121—Guiding or setting position of armatures, e.g. retaining armatures in their end position
    • H01F7/124—Guiding or setting position of armatures, e.g. retaining armatures in their end position by mechanical latch, e.g. detent

Abstract

Microelectromechanical (MEMS) devices that use MEMS electromagnetic actuators to selectively generate displacement forces and methods of fabrication are disclosed herein. According to one exemplary embodiment disclosed herein, a MEMS device may include a substrate having a surface, an actuable element at least partially formed from the substrate, and an electromagnetic actuator disposed on the substrate for selectively applying a first force to the actuable element to displace the actuable element along a path. The actuable element may have a base and an arm coupled to the base. The base may include a portion comprised of a magnetic material. The electromagnetic actuator may comprise an electrically conductive coil, and the path of the actuable element may pass through a coil gap in the coil. The electromagnetic actuator may also comprise a magnetic core about which the electrically conductive coil may be wound. MEMS devices and methods of fabrication that can minimize derailing of actuable elements during fabrication and the effects of fabrication tolerances on the operation of the devices are also disclosed herein.
PCT/US2003/004440 2002-02-21 2003-02-13 Mems devices and methods of manufacture WO2003072486A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003215222A AU2003215222A1 (en) 2002-02-21 2003-02-13 Mems devices and methods of manufacture

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US10/079,985 2002-02-21
US10/079,985 US6717227B2 (en) 2002-02-21 2002-02-21 MEMS devices and methods of manufacture
US41885302P 2002-10-16 2002-10-16
US60/418,853 2002-10-16
US10/309,964 2002-12-04
US10/309,951 US6858911B2 (en) 2002-02-21 2002-12-04 MEMS actuators
US10/309,951 2002-12-04
US10/309,964 US6900510B2 (en) 2002-02-21 2002-12-04 MEMS devices and methods for inhibiting errant motion of MEMS components

Publications (2)

Publication Number Publication Date
WO2003072486A2 WO2003072486A2 (en) 2003-09-04
WO2003072486A3 true WO2003072486A3 (en) 2004-06-03

Family

ID=27767902

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/004440 WO2003072486A2 (en) 2002-02-21 2003-02-13 Mems devices and methods of manufacture

Country Status (2)

Country Link
AU (1) AU2003215222A1 (en)
WO (1) WO2003072486A2 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5644177A (en) * 1995-02-23 1997-07-01 Wisconsin Alumni Research Foundation Micromechanical magnetically actuated devices
US5808384A (en) * 1997-06-05 1998-09-15 Wisconsin Alumni Research Foundation Single coil bistable, bidirectional micromechanical actuator
WO2000005734A1 (en) * 1998-07-23 2000-02-03 Bh Electronics, Inc. Ultra-miniature magnetic device
US6122149A (en) * 1997-06-24 2000-09-19 Seagate Technology, Inc. Magnetic microactuator and inductive sensor having shaped pole configuration
EP1081722A2 (en) * 1999-09-03 2001-03-07 Canon Kabushiki Kaisha Electromagnetic actuator, its manufacturing method, and optical scanner using the same electromagnetic actuator
EP1164601A2 (en) * 2000-06-16 2001-12-19 Canon Kabushiki Kaisha Electromagnetic actuator, its manufacturing method, and optical scanner using the same actuator

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5644177A (en) * 1995-02-23 1997-07-01 Wisconsin Alumni Research Foundation Micromechanical magnetically actuated devices
US5808384A (en) * 1997-06-05 1998-09-15 Wisconsin Alumni Research Foundation Single coil bistable, bidirectional micromechanical actuator
US6122149A (en) * 1997-06-24 2000-09-19 Seagate Technology, Inc. Magnetic microactuator and inductive sensor having shaped pole configuration
WO2000005734A1 (en) * 1998-07-23 2000-02-03 Bh Electronics, Inc. Ultra-miniature magnetic device
EP1081722A2 (en) * 1999-09-03 2001-03-07 Canon Kabushiki Kaisha Electromagnetic actuator, its manufacturing method, and optical scanner using the same electromagnetic actuator
EP1164601A2 (en) * 2000-06-16 2001-12-19 Canon Kabushiki Kaisha Electromagnetic actuator, its manufacturing method, and optical scanner using the same actuator

Also Published As

Publication number Publication date
AU2003215222A1 (en) 2003-09-09
AU2003215222A8 (en) 2003-09-09
WO2003072486A2 (en) 2003-09-04

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