EP1191559A3 - Micro-switch and method of manufacturing the same - Google Patents

Micro-switch and method of manufacturing the same Download PDF

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Publication number
EP1191559A3
EP1191559A3 EP01120498A EP01120498A EP1191559A3 EP 1191559 A3 EP1191559 A3 EP 1191559A3 EP 01120498 A EP01120498 A EP 01120498A EP 01120498 A EP01120498 A EP 01120498A EP 1191559 A3 EP1191559 A3 EP 1191559A3
Authority
EP
European Patent Office
Prior art keywords
contact elements
microswitch
carrier substrate
relates
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01120498A
Other languages
German (de)
French (fr)
Other versions
EP1191559A2 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Little Things Factory GmbH
Original Assignee
Little Things Factory GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Little Things Factory GmbH filed Critical Little Things Factory GmbH
Publication of EP1191559A2 publication Critical patent/EP1191559A2/en
Publication of EP1191559A3 publication Critical patent/EP1191559A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/64—Protective enclosures, baffle plates, or screens for contacts
    • H01H1/66—Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H01H2036/0093—Micromechanical switches actuated by a change of the magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics

Abstract

Die Erfindung betrifft einen Mikroschalter mit mindestens zwei elektrisch leitfähigen, mit externen Schaltungseinheiten verbindbaren Kontaktelementen (6), deren relative Position zueinander durch eine eingeprägte Magnetkraft veränderbar ist, wobei mindestens ein magnetisierbares Kontaktelement beweglich gelagert ist, so daß mindestens zwei Schaltzustände einstellbar sind, und wobei zumindest das magnetisierbare Kontaktelement als dünne Platte (7) ausgebildet ist, die im wesentlichen parallel zu einem Trägersubstrat (1) beweglich ist, und daß beide Kontaktelemente in einer Ebene parallel zum Trägersubstrat angeordnet sind, wobei jeweils eine Seitenfläche der Kontaktelemente als Schaltfläche dient. Außerdem betrifft die Erfindung ein Verfahren zur Herstellung eines solchen Mikroschalters.

Figure 00000001
The invention relates to a microswitch having at least two electrically conductive, connectable with external circuit units contact elements (6) whose relative position to each other by an impressed magnetic force is variable, at least one magnetizable contact element is movably mounted, so that at least two switching states are adjustable, and wherein at least the magnetizable contact element is designed as a thin plate (7), which is movable substantially parallel to a carrier substrate (1), and that both contact elements are arranged in a plane parallel to the carrier substrate, wherein each side surface of the contact elements serves as a button. Moreover, the invention relates to a method for producing such a microswitch.
Figure 00000001
EP01120498A 2000-09-01 2001-08-28 Micro-switch and method of manufacturing the same Withdrawn EP1191559A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10043549 2000-09-01
DE2000143549 DE10043549C1 (en) 2000-09-01 2000-09-01 Microswitch and method for its manufacture

Publications (2)

Publication Number Publication Date
EP1191559A2 EP1191559A2 (en) 2002-03-27
EP1191559A3 true EP1191559A3 (en) 2005-03-02

Family

ID=7654940

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01120498A Withdrawn EP1191559A3 (en) 2000-09-01 2001-08-28 Micro-switch and method of manufacturing the same

Country Status (2)

Country Link
EP (1) EP1191559A3 (en)
DE (1) DE10043549C1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10048880C2 (en) * 2000-09-29 2003-04-24 Little Things Factory Gmbh Microswitch and method for its manufacture
US7102473B2 (en) * 2002-07-31 2006-09-05 Matsushita Electric Works, Ltd. Micro-relay
US9284183B2 (en) 2005-03-04 2016-03-15 Ht Microanalytical, Inc. Method for forming normally closed micromechanical device comprising a laterally movable element
US7999642B2 (en) 2005-03-04 2011-08-16 Ht Microanalytical, Inc. Miniaturized switch device
DE102007028292B4 (en) * 2007-06-20 2019-06-19 Snaptrack, Inc. Component with reduced voltage attachment

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5430421A (en) * 1992-12-15 1995-07-04 Asulab S.A. Reed contactor and process of fabricating suspended tridimensional metallic microstructure
EP0688033A1 (en) * 1994-06-17 1995-12-20 Asulab S.A. Magnetic microswitch and its manufacturing process
US5644177A (en) * 1995-02-23 1997-07-01 Wisconsin Alumni Research Foundation Micromechanical magnetically actuated devices
DE19646667A1 (en) * 1996-11-12 1998-05-14 Fraunhofer Ges Forschung Micromechanical electrostatic relay production
EP0874379A1 (en) * 1997-04-23 1998-10-28 Asulab S.A. Magnetic microswitch and method of making
DE19800189A1 (en) * 1998-01-05 1999-07-22 Fraunhofer Ges Forschung Lateral micromechanical switch for electrical current switching
EP1119012A2 (en) * 2000-01-20 2001-07-25 Cronos Integrated Microsystems, Inc. MEMS magnetically actuated switches and associated switching arrays

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3243387A1 (en) * 1982-11-24 1984-05-24 Elektro-Apparate-Fabrik J. Hüngerle GmbH & Co KG, 7705 Steißlingen U-shaped contact spring for high-voltage connecting plugs, especially for television tubes

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5430421A (en) * 1992-12-15 1995-07-04 Asulab S.A. Reed contactor and process of fabricating suspended tridimensional metallic microstructure
EP0688033A1 (en) * 1994-06-17 1995-12-20 Asulab S.A. Magnetic microswitch and its manufacturing process
US5644177A (en) * 1995-02-23 1997-07-01 Wisconsin Alumni Research Foundation Micromechanical magnetically actuated devices
DE19646667A1 (en) * 1996-11-12 1998-05-14 Fraunhofer Ges Forschung Micromechanical electrostatic relay production
EP0874379A1 (en) * 1997-04-23 1998-10-28 Asulab S.A. Magnetic microswitch and method of making
DE19800189A1 (en) * 1998-01-05 1999-07-22 Fraunhofer Ges Forschung Lateral micromechanical switch for electrical current switching
EP1119012A2 (en) * 2000-01-20 2001-07-25 Cronos Integrated Microsystems, Inc. MEMS magnetically actuated switches and associated switching arrays

Also Published As

Publication number Publication date
DE10043549C1 (en) 2002-06-20
EP1191559A2 (en) 2002-03-27

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