DE10133013A1 - Barrier lock, to give a controlled released of a liquid sample from a reservoir, has a thin membrane covering the substrate and the holding recesses, with a heater wire to open the membrane through an electrical current signal - Google Patents
Barrier lock, to give a controlled released of a liquid sample from a reservoir, has a thin membrane covering the substrate and the holding recesses, with a heater wire to open the membrane through an electrical current signalInfo
- Publication number
- DE10133013A1 DE10133013A1 DE2001133013 DE10133013A DE10133013A1 DE 10133013 A1 DE10133013 A1 DE 10133013A1 DE 2001133013 DE2001133013 DE 2001133013 DE 10133013 A DE10133013 A DE 10133013A DE 10133013 A1 DE10133013 A1 DE 10133013A1
- Authority
- DE
- Germany
- Prior art keywords
- membrane
- reservoir
- substrate
- electrical current
- open
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/025—Actuating devices; Operating means; Releasing devices electric; magnetic actuated by thermo-electric means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/04—Closures and closing means
- B01L2300/046—Function or devices integrated in the closure
- B01L2300/049—Valves integrated in closure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/06—Valves, specific forms thereof
- B01L2400/0633—Valves, specific forms thereof with moving parts
- B01L2400/0638—Valves, specific forms thereof with moving parts membrane valves, flap valves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/508—Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above
Abstract
Description
Die Erfindung betrifft einen Verschluss für Hohlräume oder Durchführungen, der durch einen elektrischen Strom geöffnet werden kann nach dem Oberbegriff des Patentanspruchs 1. The invention relates to a closure for cavities or Bushings that are opened by an electric current can be according to the preamble of claim 1.
Für die Handhabung kleiner flüssiger Proben in Kapillarsystemen ist es oft wünschenswert, die Probe in einem Volumen oder Reservoir dicht verschlossen zu halten, um sie dann im Moment einer Analyse synchron zu einem elektrischen Signal freizugeben. Der klassische Weg zur Lösung dieser Fragestellung besteht darin, am Reservoir ein Ventil anzubringen, das aufgrund eines elektrischen Signales geöffnet wird. Wenn aber auf einer Grundplatte sehr viele Reservoirs nebeneinander angeordnet sind, wie dies z. B. bei biotechnologischen Anwendungen und in der Wirkstoffforschung üblich ist, ist der Aufwand, jedes der Reservoirs mit einem eigenen Ventil zu versehen, zu groß. For handling small liquid samples in It is often desirable to capillary in a volume or sample To keep the reservoir tightly closed, then at the moment an analysis in sync with an electrical signal release. The classic way to solve this question consists in attaching a valve to the reservoir, which due to an electrical signal is opened. But if on one Base plate very many reservoirs arranged side by side are how this z. B. in biotechnological applications and in Drug research is common, the effort is each Too big reservoirs with their own valve.
In der Offenlegungsschrift DE 198 58 443 A1 ist ein Verfahren beschrieben, bei dem der Boden eines kleinen Reservoirs mit einem Laserstrahl geöffnet wird. A method is described in published patent application DE 198 58 443 A1 described in which the bottom of a small reservoir with opened with a laser beam.
Nachteilig bei diesem Verfahren ist, dass ein Laser benötigt wird, der gezielt auf den Boden des jeweiligen Reservoirs ausgerichtet werden muss. The disadvantage of this method is that a laser is required is targeted to the bottom of the respective reservoir must be aligned.
Aufgabe der Erfindung ist es, einen Verschluss für Hohlräume anzugeben, der auf einfache Weise durch ein elektrisches Signal geöffnet werden kann, ohne dass ein zusätzliches Werkzeug benötigt würde. Gelöst wird diese Aufgabe durch die Merkmale des Patentanspruches 1. Die übrigen Ansprüche beschreiben vorteilhafte Ausgestaltungen der Erfindung. The object of the invention is a closure for cavities specify that easily by an electrical Signal can be opened without the need for an additional tool would be needed. This task is solved by the characteristics of claim 1. Describe the remaining claims advantageous embodiments of the invention.
Die Erfindung wird im folgenden anhand von den Fig. 1 bis 4 und von zwei Ausführungsbeispielen näher erläutert. Dabei zeigen die Figuren schematisch den Aufbau der gefertigten Vorrichtung bzw. einzelne Stadien während deren Herstellung. The invention is explained in more detail below with reference to FIGS. 1 to 4 and two exemplary embodiments. The figures schematically show the structure of the manufactured device or individual stages during its manufacture.
Die Figuren sind nicht maßstäblich gezeichnet, um sehr dünne bzw. kleine Strukturen neben vergleichsweise großen Strukturen deutlich werden zu lassen. The figures are not drawn to scale to be very thin or small structures in addition to comparatively large structures to make it clear.
Das erste Anwendungsbeispiel beschreibt einen Verschluss für Hohlräume, der von einer Membran mit einem darauf angebrachten Heizdraht gebildet wird. In den Figuren sind der Übersichtlichkeit wegen nur ein oder zwei Verschlüsse dargestellt. Es können aber viele Verschlüsse parallel nebeneinander angebracht und so wesentlich Kosten gespart werden. The first application example describes a closure for Cavities by a membrane with one attached to it Heating wire is formed. In the figures, the Clarity shown because of only one or two closures. It but many closures can be placed side by side in parallel attached and so significant costs can be saved.
Wie in Fig. 1 auf der linken Seite dargestellt ist, ist eine 5 µm dicke Membran 1 aus Polytetrafluorethylen (PTFE) auf einem Substrat 2 aus Polyetheretherketon (PEEK) mit Hohlräumen 3 so angebracht, dass die Hohlräume 3 vollständig verschlossen werden. Auf der Membran 1 sind ein Heizdraht 4 und eine weitere dünne Schicht 5 aus 100 nm dickem Gold angebracht. Die Goldschicht 5 wird so auf der Membran 1 angebracht, dass sie unter einer mechanischen Zugspannung steht. As shown in Fig. 1 on the left side, a 5 micron thick membrane 1 made of polytetrafluoroethylene (PTFE) is attached to a substrate 2 made of polyether ether ketone (PEEK) with cavities 3 so that the cavities 3 are completely closed. A heating wire 4 and a further thin layer 5 made of 100 nm thick gold are attached to the membrane 1 . The gold layer 5 is applied to the membrane 1 so that it is under a mechanical tensile stress.
Zum Öffnen des Verschlusses wird ein elektrischer Strom durch den Heizdraht 4 geleitet, sodass sich der Heizdraht 4 und der unmittelbar darunter liegende Teil der Membran 1 erwärmen, bis das Material der Membran 1 so weich wird, dass sich im Bereich des Heizdrahtes ein Spalt in der Membran 1 bildet. Daraufhin relaxiert die Zugspannung in der Schicht 5 und ein Teil 1a der Membran 1 wird, wie rechts in Fig. 1 dargestellt ist, zusammen mit einem Teil 5a der Schicht 5 zum Rand hin aufgerollt, sodass der Hohlraum 3 geöffnet wird. To open the closure, an electrical current is passed through the heating wire 4 , so that the heating wire 4 and the part of the membrane 1 immediately below it heat up until the material of the membrane 1 becomes so soft that there is a gap in the area of the heating wire Membrane 1 forms. The tensile stress in layer 5 then relaxes and, as shown on the right in FIG. 1, part 1 a of membrane 1 is rolled up to the edge together with part 5 a of layer 5 , so that cavity 3 is opened.
Fig. 2 zeigt eine Aufsicht auf einen geschlossenen Verschluss mit dem Heizdraht 4 und seinen Zuleitungen und der Schicht 5. Die Lage des Randes 3a des Hohlraumes 3 unter der Membran 1 ist als gestrichelte Linie markiert. Fig. 2 shows a plan view of a closed bolt with the heating wire 4 and its supply lines and the layer 5. The position of the edge 3 a of the cavity 3 under the membrane 1 is marked as a dashed line.
Der Heizdraht 4 und/oder die Schicht 5 können auch auf der anderen Seite der Membran 1 im Innern des Hohlraumes 3 angeordnet werden, wenn dies aus fertigungstechnischen Gründen oder in der Anwendung einen Vorteil darstellt. The heating wire 4 and / or the layer 5 can also be arranged on the other side of the membrane 1 in the interior of the cavity 3 if this is an advantage for manufacturing reasons or in use.
Aus fertigungstechnischen Gründen ist es in der Regel ein Vorteil, wenn die Schicht 5 und der Heizdraht 4 aus dem gleichen Material bestehen und die gleiche Dicke aufweisen. Es ist aber auch möglich, verschiedene Materialien für den Heizdraht 4 und die Schicht 5 zu wählen und/oder sie in unterschiedlicher Dicke zu fertigen. For manufacturing reasons, it is usually an advantage if the layer 5 and the heating wire 4 are made of the same material and have the same thickness. However, it is also possible to choose different materials for the heating wire 4 and the layer 5 and / or to manufacture them in different thicknesses.
Auf die Schicht 5 kann ganz verzichtet werden, wenn die Membran 1 selbst eine hinreichend hohe mechanische Spannung aufweist, sodass sie bei einer Erwärmung im Bereich des Heizdrahtes 4 einreißt. Auf die Schicht 5 kann ebenso verzichtet werden, wenn eine Druckdifferenz über der Membran 1 abfällt, die zum Einreißen der Membran 1 führt, sobald sie lokal durch den Heizdraht erwärmt wird. Dies ist z. B. beim Verschluss von Kanälen der Fall, durch die ein Analysefluid bzw. ein zu analysierendes Fluid geleitet wird. Zuerst wird durch den Verschluss das Fluid zurückgehalten und übt einen Druck auf den Verschluss aus. Durch Erwärmen des Heizdrahtes wird der Verschluss geöffnet und das Fluid kann durch den geöffneten Verschluss strömen. The layer 5 can be dispensed with entirely if the membrane 1 itself has a sufficiently high mechanical tension so that it tears in the area of the heating wire 4 when heated. The layer 5 can also be dispensed with if a pressure difference across the membrane 1 drops, which leads to the membrane 1 tearing as soon as it is locally heated by the heating wire. This is e.g. B. the closure of channels through which an analysis fluid or a fluid to be analyzed is passed. First, the fluid is retained by the closure and exerts pressure on the closure. By heating the heating wire, the closure is opened and the fluid can flow through the opened closure.
Ein Verschluss, wie er hier beschrieben ist, kann nicht nur zum hermetischen Verschließen eines Hohlraumes eingesetzt werden, sondern auch ein nach oben offenes Reservoir verschließen, oder zwei Kapillarsysteme von einander trennen, die durch ein elektrisches Signal miteinander verbunden werden sollen. A closure as described here can not only used for hermetically sealing a cavity but also an open-topped reservoir seal, or separate two capillary systems from each other, the be connected to each other by an electrical signal should.
Es ist auch möglich, einen Heizdraht 4 innen oder außen an einer hinreichend dünnen Stelle einer Begrenzungswand 1 eines Hohlraumes anzubringen, wie es in Fig. 3 dargestellt ist. Im zweiten Anwendungsbeispiel wird ein Verschluss beschrieben, bei dem eine Sollbruchstelle das Öffnen erleichtert. It is also possible to attach a heating wire 4 inside or outside at a sufficiently thin location on a boundary wall 1 of a cavity, as shown in FIG. 3. In the second application example, a closure is described in which a predetermined breaking point makes opening easier.
In einem Kanalsystem aus Polysulfon (PSU) mit einem quadratischen, 4.4 mm2 großen Querschnitt wird der Zustrom eines Gases durch den in Fig. 4 in Aufsicht gezeigten Verschluss im wesentlichen unterbunden. Der Verschluss wird durch eine 2 µm dicke Membran aus Polyimid (PI) gebildet in der zur Perforation kreisförmige Öffnungen 7 mit einem Durchmesser von 200 µm angebracht sind. Im Zentrum der Membran ist ein Heizdraht 4 und Schichten 5 aus 100 nm dickem Wolfram angebracht. Ein elektrischer Strom erwärmt den Heizdraht 4 so sehr, dass die Membran in diesem Bereich unterbrochen wird. Die Perforation führt dazu, dass die Membran entlang der Öffnungen 7 einreißt, auch wenn der Druckunterschied über der Membran nicht sehr groß ist. Ferner führt eine mechanische Vorspannung in der Wolframschicht 5 und in den Zuleitungen zum Heizdraht 4 dazu, dass sich die Membran zum Rand hin aufrollt und so die Öffnung im wesentlichen freigibt. In a channel system made of polysulfone (PSU) with a square, 4.4 mm 2 cross-section, the inflow of a gas is essentially prevented by the closure shown in FIG. 4 in top view. The closure is formed by a 2 μm thick membrane made of polyimide (PI) in which circular openings 7 with a diameter of 200 μm are provided for perforation. A heating wire 4 and layers 5 made of 100 nm thick tungsten are attached in the center of the membrane. An electric current heats the heating wire 4 so much that the membrane is interrupted in this area. The perforation causes the membrane to tear along the openings 7 , even if the pressure difference across the membrane is not very great. Furthermore, a mechanical prestress in the tungsten layer 5 and in the feed lines to the heating wire 4 leads to the membrane rolling up towards the edge and thus essentially opening up the opening.
Ein Verschluss in dieser Art hat den Vorteil, dass nur ein ganz kleiner Teil, einer sehr dünnen Membran soweit erwärmt zu werden braucht, dass er weich wird und der mechanischen Spannung in der Membran bzw. in der Schicht 5 und den Zuleitungen zum Heizdraht nachgibt. Deshalb ist nur eine ganz kleine elektrische Energiemenge notwendig, um die den Verschluss zu öffnen. A closure of this type has the advantage that only a very small part, a very thin membrane, needs to be heated to such an extent that it becomes soft and yields to the mechanical tension in the membrane or in layer 5 and the leads to the heating wire. Therefore, only a very small amount of electrical energy is required to open the closure.
Es ist auch möglich, statt der durchgehenden Öffnungen 7 in der Membran verjüngte Bereiche vorzusehen, entlang derer die Membran leicht einreißen kann. Dies hat den Vorteil, dass die Membran das Kanalsystem dichter verschließen kann. Instead of the through openings 7 in the membrane, it is also possible to provide tapered regions along which the membrane can easily tear. This has the advantage that the membrane can close the channel system more tightly.
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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DE2001133013 DE10133013C2 (en) | 2001-07-06 | 2001-07-06 | Closure for cavities or feedthroughs |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2001133013 DE10133013C2 (en) | 2001-07-06 | 2001-07-06 | Closure for cavities or feedthroughs |
Publications (2)
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DE10133013A1 true DE10133013A1 (en) | 2003-01-23 |
DE10133013C2 DE10133013C2 (en) | 2003-07-03 |
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DE2001133013 Expired - Fee Related DE10133013C2 (en) | 2001-07-06 | 2001-07-06 | Closure for cavities or feedthroughs |
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