CN103573576B - Magnetohydrodynamic micropump - Google Patents

Magnetohydrodynamic micropump Download PDF

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CN103573576B
CN103573576B CN201310597265.XA CN201310597265A CN103573576B CN 103573576 B CN103573576 B CN 103573576B CN 201310597265 A CN201310597265 A CN 201310597265A CN 103573576 B CN103573576 B CN 103573576B
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micropump
electrode
magnetohydrodynamic
matrix
micro passage
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CN103573576A (en
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永远
李强
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Southwest Jiaotong University
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Southwest Jiaotong University
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Abstract

The invention discloses a kind of size less, can with the Magnetohydrodynamic micropump of portable integrated chip.This Magnetohydrodynamic micropump, comprise substrate, the lower surface of described substrate is provided with plane electromagnetic iron, the upper surface of described substrate is provided with matrix, the liquid storage tank described matrix being etched with micro passage and being communicated with micro passage, is provided with electrode in the both sides of micro passage, and described electrode sputters at the upper surface of matrix, also comprise for the encapsulated layer by micro-channels, described encapsulated layer is provided with spout and electrode access aperture.This Magnetohydrodynamic micropump produces magnetic field owing to adopting plane electromagnetic iron, instead of existing 3 D electromagnetic iron as magnetic field sources, thus make the size of the Magnetohydrodynamic micropump made less, more easily realize microminiaturization, can with portable integrated chip, and the processing of plane electromagnetic iron is more simple, reduce the processing and fabricating cost of Magnetohydrodynamic micropump.Be adapted at non-mechanical field of micropumps to apply.

Description

Magnetohydrodynamic micropump
Technical field
The present invention relates to non-mechanical field of micropumps, be specifically related to a kind of Magnetohydrodynamic micropump.
Background technique
Along with the maturation of MEMS technology, the fabricating cost of miniaturized devices reduces gradually, and can the components and parts of integrated several functions on the same chip, thus makes miniaturized devices more and more be subject to the welcome of user.Microfluidic device is widely used in the research fields such as analytical chemistry, medical diagnosis, medicament slow release, genomics, proteomics, has that reagent dosage is few, pollutant emission is low, chemical reaction velocity soon, accurately controls the advantages such as reaction, portability.From 2005 to 2011, the market of microfluidic field was worth the speed increment with annual 16%, and end 2011, the market value of whole microfluidic device has reached 5,000,000,000 Euros.Micropump is as the important component part of microfluidic device, and its effect is the quantitative transmission realizing fluid, thus makes the function such as flowing, mixing, separation, analysis detection realizing sample on the same chip.Along with the fast development in microfluidic device field, Micropump will occupy huge market value.
Micropump can be divided into mechanical and non-mechanism two kinds.Early stage Micropump belongs to mechanical Micropump, is the microminiaturization of the mechanical pump to macroscopic view.There is the mechanical Micropump of valve to also exist because check valve inlet and outlet end both sides have high pressure drop, and cause wearing and tearing and the fatigue problem of valve.Wearing and tearing and fatigue problem limit use field and the working life of mechanical Micropump.Valveless mechanical type Micropump utilizes moveable barrier film to carry out the suction of liquid, as piezoelectric crystal Micropump, hot Pneumatic Micropump, mems electrostatic pump etc.Piezoelectric crystal Micropump is widely used in biomedical sector, as medicament slow release, and fixed point treatment field.But piezoelectric crystal requires higher driving voltage.Mems electrostatic pump can produce higher flow, but also needs higher driving voltage.Hot Pneumatic Micropump needs to make miniature heater, and pumping efficiency is lower.Non-mechanism Micropump does not have moveable part, usually utilizes the microeffect ignored under macroscopic conditions, as capillary effect, electric moistening effect etc.Because the range of flow of non-mechanism Micropump is less, usually in μ l/min ~ ml/min scope, and there is not the wear problem of Micropump, can not have an impact to biological sample, therefore be highly suitable for microfluid system field, the analysis being applicable to biochemical drug detects.Non-mechanism Micropump common at present has electric osmose Micropump, electric moistening Micropump, Magnetohydrodynamic micropump, bubble Micropump, Capillary Micro-pump etc.Realized business-like mainly electric osmose Micropump, but electric osmose Micropump can only aspirate the lower solution of electric conductivity, and need higher driving voltage.The processing of the moistening Micropump of electricity, bubble Micropump is comparatively complicated, and cost is higher.The flow that Capillary Micro-pump produces is less, is only applicable to the sample analysis of denier.Magneto fluid mechanics is research conducting liquid and the interactional subject of electromagnetic field.At first, in plasma physics research field, magneto fluid mechanics is widely used in suction and controls metal liquid.Magnetohydrodynamic micropump utilizes Lorentz force as suction mechanism.Compared to other non-mechanism Micropump, Magnetohydrodynamic micropump has that driving voltage is less, course of working is simple, realize bi-directional drive to liquid, can be used in aspirating moderate conducting liquid, continuous print flowing can be produced, can be used for aspirating biological sample, and the advantages such as integrated can be carried out with other microfluidic devices, the fields such as chemical field, biologic applications field, microelectronic cooling can be widely used in.Magnetohydrodynamic micropump can be divided into once-through type and AC type two kinds of modes, and once-through type structure exists the electrolysis problem of electrolyte solution and the degradation problem of electrode.Due to the existence of Electrolysis, make to produce a large amount of bubble in passage, thus add liquid flowing resistance.In addition, the degraded of electrode makes reduce the working life of once-through type Magnetohydrodynamic micropump.Current improving one's methods adopts oxidation-reduction type solution as electrolyte solution, thus realize reversible electrochemical reaction at electrode position.But this method needs the redox electrolyte solutions of high concentration, thus larger interference is produced to the detection of late-run sample.Adopt the Magnetohydrodynamic micropump of exchange way effectively can solve the problem of electrolysis and electrode degrading.By applying alternating voltage to electrode and electromagnet simultaneously, realize the directional flow of fluid.
Magnetohydrodynamic micropump is all generally directly install to make electromagnet structure bottom micro passage, thus makes to have stronger magnetic intensity in passage.The electromagnet structure of existing Magnetohydrodynamic micropump is all adopt 3 D electromagnetic iron usually, and 3 D electromagnetic iron volume is larger, this just makes Magnetohydrodynamic micropump size larger, be not easy to realize microminiaturization, cannot with portable integrated chip, and 3 D electromagnetic ironworking is complicated, also makes the processing and fabricating cost of Magnetohydrodynamic micropump higher.
Summary of the invention
Technical problem to be solved by this invention be to provide a kind of size less, can with the Magnetohydrodynamic micropump of portable integrated chip.
The present invention solves the problems of the technologies described above adopted technological scheme: this Magnetohydrodynamic micropump, comprise substrate, the lower surface of described substrate is provided with plane electromagnetic iron, the upper surface of described substrate is provided with matrix, the liquid storage tank described matrix being etched with micro passage and being communicated with micro passage, the both sides of micro passage are provided with electrode, described electrode sputters at the upper surface of matrix, also comprising for the encapsulated layer by micro-channels, described encapsulated layer being provided with the spout for liquid being injected liquid storage tank and electrode access aperture.
Further, plane magnet coil is set at the lower surface of substrate and forms described plane electromagnetic iron.
Be further, the lower surface of described substrate deposits isolation layer, and described isolation layer has through hole, and described through hole is positioned at the center of plane magnet coil, described isolation layer upper surface deposits magnetic yoke structure, and described magnetic yoke structure is electrical contact in described through hole and plane magnet coil.
Further, described magnetic yoke structure is formed in the upper surface deposited nickel layer of isolation layer.
Further, described isolation layer adopts silica to make.
Further, described encapsulated layer adopts dimethyl silicone polymer to make.
Further, the thickness of described encapsulated layer is 10 ~ 40 μm.
Further, titanium layer is deposited between described electrode and the upper surface of matrix.
Further, described matrix adopts SU-8 optical resist to make.
Further, described electrode is gold electrode.
Beneficial effect of the present invention: this Magnetohydrodynamic micropump produces magnetic field owing to adopting plane electromagnetic iron, instead of existing 3 D electromagnetic iron as magnetic field sources, thus make the size of the Magnetohydrodynamic micropump made less, more easily realize microminiaturization, can with portable integrated chip, and, the processing of plane electromagnetic iron is more simple, reduce the processing and fabricating cost of Magnetohydrodynamic micropump, in addition, electrode of the present invention is arranged on the both sides of micro passage, and perpendicular to channel bottom, make to form uniform electric field between two electrodes, thus the Lorentz force that electric field and magnetic field interaction produce points to the length direction of micro passage, reduce the flow disturbance that the dispersion due to Lorentz force direction causes to the utmost, thus possess good pumping efficiency.
Accompanying drawing explanation
Fig. 1 is the three-dimensional structure schematic diagram of Magnetohydrodynamic micropump of the present invention;
Fig. 2 is the electrode structure schematic diagram of Magnetohydrodynamic micropump of the present invention;
Fig. 3 is the base structure schematic diagram of Magnetohydrodynamic micropump of the present invention;
Fig. 4 is the encapsulation layer structure schematic diagram of Magnetohydrodynamic micropump of the present invention;
Fig. 5 is the plane magnet coil structural representation of Magnetohydrodynamic micropump of the present invention;
Fig. 6 is the magnetic yoke structure schematic diagram of Magnetohydrodynamic micropump of the present invention;
Description of symbols in figure: substrate 1, matrix 2, micro passage 3, liquid storage tank 4, electrode 5, encapsulated layer 6, spout 7, electrode access aperture 8, plane magnet coil 9, through hole 10, magnetic yoke structure 11.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is further described.
As shown in Figures 1 to 6, this Magnetohydrodynamic micropump, comprise substrate 1, the lower surface of described substrate 1 is provided with plane electromagnetic iron, the upper surface of described substrate 1 is provided with matrix 2, the liquid storage tank 4 described matrix 2 being etched with micro passage 3 and being communicated with micro passage 3, the both sides of micro passage 3 are provided with electrode 5, described electrode 5 sputters at the upper surface of matrix 2, also comprising the encapsulated layer 6 for being sealed micro passage 3, described encapsulated layer 6 being provided with the spout 7 for liquid being injected liquid storage tank 4 and electrode access aperture 8.This Magnetohydrodynamic micropump produces magnetic field owing to adopting plane electromagnetic iron, instead of existing 3 D electromagnetic iron as magnetic field sources, thus make the size of the Magnetohydrodynamic micropump made less, more easily realize microminiaturization, can with portable integrated chip, and, the processing of plane electromagnetic iron is more simple, reduce the processing and fabricating cost of Magnetohydrodynamic micropump, in addition, electrode 5 of the present invention is arranged on the both sides of micro passage 3, and perpendicular to channel bottom, make to form uniform electric field between two electrodes 5, thus the Lorentz force that electric field and magnetic field interaction produce points to the length direction of micro passage 3, reduce the flow disturbance that the dispersion due to Lorentz force direction causes to the utmost, thus possess good pumping efficiency.
For the ease of processing and fabricating plane electromagnetic iron, described plane electromagnetic iron is formed as preferably arranging plane magnet coil 9 at the lower surface of substrate 1, the arrangement of described plane magnet coil 9 is matrix arrangement, and the constant dimension of plane magnet coil 9, described plane magnet coil 9 can adopt ferromagnetic substance to make, and also can be made up of copper coil or silver-colored coil.
Be further, the lower surface of described substrate 1 deposits isolation layer, described isolation layer has through hole 10, described through hole 10 is positioned at the center of plane magnet coil 9, described isolation layer upper surface deposits magnetic yoke structure 11, and described magnetic yoke structure 11 is electrical contact in described through hole 10 place and plane magnet coil 9.The magnetic intensity of plane magnet coil 9 can be strengthened by arranging magnetic yoke structure 11, further increasing the Lorentz force that electric field and magnetic field interaction produce, thus increase the suction capactity of Magnetohydrodynamic micropump.
In order to the magnetic intensity making magnetic yoke structure 11 can strengthen plane magnet coil 9 to greatest extent, described magnetic yoke structure 11 is formed in the upper surface deposited nickel layer of isolation layer, nickel is Paramagnetic material, its relative permeability is 600, can strengthen the magnetic intensity that plane magnet coil 9 produces to greatest extent, nickel dam is deposited on the upper surface of isolation layer by the method for magnetron sputtering.
Described isolation layer can adopt existing various insulating material to make, and in order to ensure good insulation effect, described isolation layer adopts silica or optical resist to make.
Described encapsulated layer 6 adopts dimethyl silicone polymer to make, polydimethylsiloxane is adopted to seal micro passage 3, compared to glass, the hardness of polydimethylsiloxane is lower, there is good mechanical flexibility, when the effect that polydimethylsiloxane is under pressure, due to the pliability that it is good, complete sealing can be carried out to micro passage 3, there is not dead space, thus ensure good sealing effect, in addition, polydimethylsiloxane has good transmittance to light, therefore the endocorpuscular detection of passage is facilitated, the monitoring of liquid flow condition.PDMS prepolymer and curing agent mix with the ratio of 10:1, process in early stage is carried out to PDMS mixture, need the gas fully removed in mixed solvent, make PDMS thin layer, in the mode of spin coating after solidification on chip glass surface, by punching on thin layer, produce spout 7 and electrode access aperture 8, and PDMS is carried out oxygen plasma treatment 70W, 75mtorr, 10s, makes surface for hydrophily.
Under the prerequisite ensureing good sealing effect, reduce costs to greatest extent, the thickness of described encapsulated layer 6 is preferably 10 ~ 40 μm.
In order to the stickiness between intensifier electrode and matrix 2, deposit titanium layer between the upper surface of described electrode and matrix 2, the thickness of described titanium layer is about 10nm.
For the ease of processing micro passage 3, simplify micro Process flow process, described matrix 2 adopts SU-8 optical resist to make, because SU-8 optical resist has good mechanical property and chemical stability, can directly as structural material, thus simplify micro Process flow process, spin coating adhesive on the base 1 is only needed when making, spin coating SU-8 optical resist again, carry out the exposure imaging process of specific pattern, obtain the processing and fabricating that micro passage 3 structure can complete micro passage 3, described micro passage 3 has level and smooth loop configuration, decrease the existence of external pressure difference and the interference of the flow-speed measurement caused.
In addition, described electrode 5 can adopt platinum electrode, aluminium electrode etc., as preferably: described electrode 5 is gold electrode.Described gold electrode is made in the following way, first be about the thick layer gold of 200nm with method sputtering sedimentation one deck of magnetron sputtering, then by the method for aligning, photoetching, graphic making is carried out to layer gold, comprise electrode structure and pin configuration, thus the side-wall electrode obtaining electric property, have good uniformity.

Claims (8)

1. Magnetohydrodynamic micropump, it is characterized in that: comprise substrate (1), the lower surface of described substrate (1) is provided with plane electromagnetic iron, the upper surface of described substrate (1) is provided with matrix (2), the liquid storage tank (4) described matrix (2) being etched with micro passage (3) and being communicated with micro passage (3), the both sides of micro passage (3) are provided with electrode (5), described electrode (5) sputters at the upper surface of matrix (2), also comprise the encapsulated layer (6) for micro passage (3) being sealed, described encapsulated layer (6) is provided with the spout (7) for liquid being injected liquid storage tank (4) and electrode access aperture (8), at the lower surface of substrate (1), the plane electromagnetic iron described in plane magnet coil (9) formation is set, the lower surface of described substrate (1) deposits isolation layer, described isolation layer has through hole (10), described through hole (10) is positioned at the center of plane magnet coil (9), described isolation layer upper surface deposits magnetic yoke structure (11), described magnetic yoke structure (11) is at the middle electrical contact of described through hole (10) place and plane magnet coil (9).
2. Magnetohydrodynamic micropump as claimed in claim 1, is characterized in that: form described magnetic yoke structure (11) in the upper surface deposited nickel layer of isolation layer.
3. Magnetohydrodynamic micropump as claimed in claim 2, is characterized in that: described isolation layer adopts silica to make.
4. according to the Magnetohydrodynamic micropump in claims 1 to 3 described in any one claim, it is characterized in that: described encapsulated layer (6) adopts dimethyl silicone polymer to make.
5. Magnetohydrodynamic micropump as claimed in claim 4, is characterized in that: the thickness of described encapsulated layer (6) is 10 ~ 40 μm.
6. Magnetohydrodynamic micropump as claimed in claim 5, is characterized in that: deposit titanium layer between the upper surface of described electrode (5) and matrix (2).
7. Magnetohydrodynamic micropump as claimed in claim 6, is characterized in that: described matrix (2) adopts SU-8 optical resist to make.
8. Magnetohydrodynamic micropump as claimed in claim 7, is characterized in that: described electrode (5) is gold electrode.
CN201310597265.XA 2013-11-21 2013-11-21 Magnetohydrodynamic micropump Active CN103573576B (en)

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CN103864000B (en) * 2014-02-28 2016-02-03 西南交通大学 A kind of electric conjugation fluidic micropumps
CN107155285A (en) * 2017-06-30 2017-09-12 哈尔滨工业大学 Temprature control method of the electronic equipment internal based on microchannel heat-transfer character
CN110752110B (en) * 2019-10-09 2021-09-03 南京理工大学 Microfluid inertia power connection switch capable of realizing bidirectional identification
CN112892619B (en) * 2019-12-04 2022-07-15 香港城市大学深圳研究院 PDMS (polydimethylsiloxane) master mold with arc-shaped edge section, micro-fluidic valve and chip and preparation thereof
CN113833634B (en) * 2021-09-01 2023-05-23 北京航空航天大学 Electromagnetic driving MEMS micropump and integrated processing technology of micropump
CN115263714B (en) * 2022-08-04 2024-02-09 浙江大学 Micropump device for driving micro gear by acoustic surface wave

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US6146103A (en) * 1998-10-09 2000-11-14 The Regents Of The University Of California Micromachined magnetohydrodynamic actuators and sensors
CN1540163A (en) * 2003-11-01 2004-10-27 浙江大学 Magnetic fluid impulse type minipump
CN2654899Y (en) * 2003-11-06 2004-11-10 浙江大学 Mini-electromagnetic pump
TWM255335U (en) * 2003-12-23 2005-01-11 Chung Shan Inst Of Science Magnetohydrodynamic micropump with comb drive type electrode
US7672129B1 (en) * 2006-09-19 2010-03-02 Sun Microsystems, Inc. Intelligent microchannel cooling

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6146103A (en) * 1998-10-09 2000-11-14 The Regents Of The University Of California Micromachined magnetohydrodynamic actuators and sensors
CN1540163A (en) * 2003-11-01 2004-10-27 浙江大学 Magnetic fluid impulse type minipump
CN2654899Y (en) * 2003-11-06 2004-11-10 浙江大学 Mini-electromagnetic pump
TWM255335U (en) * 2003-12-23 2005-01-11 Chung Shan Inst Of Science Magnetohydrodynamic micropump with comb drive type electrode
US7672129B1 (en) * 2006-09-19 2010-03-02 Sun Microsystems, Inc. Intelligent microchannel cooling

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