CN103573576A - Magnetohydrodynamic micropump - Google Patents

Magnetohydrodynamic micropump Download PDF

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Publication number
CN103573576A
CN103573576A CN201310597265.XA CN201310597265A CN103573576A CN 103573576 A CN103573576 A CN 103573576A CN 201310597265 A CN201310597265 A CN 201310597265A CN 103573576 A CN103573576 A CN 103573576A
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micropump
fluid mechanics
electrode
matrix
substrate
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CN103573576B (en
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永远
李强
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Southwest Jiaotong University
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Southwest Jiaotong University
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Abstract

The invention discloses a magnetohydrodynamic micropump which is small in size and can be integrated with a portable chip. The magnetohydrodynamic micropump comprises a substrate, wherein a flat type electromagnet is arranged on the lower surface of the substrate; a matrix is arranged on the upper surface of the substrate; the matrix is etched with a microchannel and a liquid storage tank which is communicated with the microchannel; electrodes are arranged on the two sides of the microchannel; the electrodes are sputtered on the upper surface of the matrix; the magnetohydrodynamic micropump further comprises a packaging layer for sealing the microchannel; a liquid injection hole and an electrode access hole are formed on the packaging layer. The flat type electromagnetic is used to generate magnetic field on the magnetohydrodynamic micropump, which substitutes the existing three-dimensional electromagnetic as a magnetic field source, so that the manufactured magnetohydrodynamic micropump is small in size, easy to be microminiaturized, and can be integrated with the portable chip. Furthermore, the flat type electromagnet is simpler to be processed, so that the processing and manufacturing cost of the magnetohydrodynamic micropump can be reduced. The magnetohydrodynamic micropump can be suitable for being promoted and applied in the non-mechanical type micropump field.

Description

Magneto fluid mechanics Micropump
Technical field
The present invention relates to on-mechanical formula field of micropumps, be specifically related to a kind of magneto fluid mechanics Micropump.
Background technique
Along with the maturation of MEMS technology, the fabricating cost of microminiaturized device reduces gradually, and can be on same chip the components and parts of integrated several functions, thereby make microminiaturized device more and more be subject to user's welcome.Microfluidic device is widely used in the research fields such as analytical chemistry, medical diagnosis, medicament slow release, genomics, proteomics, has the advantages such as reagent dosage is few, pollutant emission is low, chemical reaction velocity is fast, accurately control reaction, portability.From 2005 to 2011, the market in microfluid field was worth the speed increment with annual 16%, ends 2011, and the market value of whole microfluidic device has reached 5,000,000,000 Euros.Micropump is as the important component part of microfluidic device, and its effect is the quantitative transmission that realizes fluid, thereby makes to realize the functions such as the flowing of sample, mixing, separation, analyzing and testing on same chip.Along with the fast development in microfluidic device field, Micropump will occupy huge market value.
Micropump can be divided into two kinds of mechanical and non-mechanisms.Early stage Micropump belongs to mechanical Micropump, is the microminiaturization to macroscopical mechanical pump.There is the mechanical Micropump of valve to exist because check valve inlet and outlet end both sides have high pressure drop, and cause wearing and tearing and the fatigue problem of valve.Use field and working life that wearing and tearing and fatigue problem have limited mechanical Micropump.Valveless mechanical type Micropump utilizes movably barrier film to carry out the suction of liquid, as piezoelectric crystal Micropump, hot Pneumatic Micropump, mems electrostatic pump etc.Piezoelectric crystal Micropump has been widely used in biomedical sector, as medicament slow release, and fixed point treatment field.But the driving voltage that piezoelectric crystal is had relatively high expectations.Mems electrostatic pump can produce higher flow, but also needs higher driving voltage.Hot Pneumatic Micropump need to be made miniature heater, and pumping efficiency is lower.Non-mechanism Micropump does not have moveable part, conventionally utilizes the microeffect of ignoring under macroscopic conditions, as capillary effect, electric moistening effect etc.Because the range of flow of non-mechanism Micropump is less, conventionally in μ l/min~ml/min scope, and there is not the wear problem of Micropump, can not exert an influence to biological sample, therefore be highly suitable for microfluid system field, be applicable to the analyzing and testing of biochemical drug.Common non-mechanism Micropump has electric osmose Micropump, electric moistening Micropump, magneto fluid mechanics Micropump, bubble Micropump, Capillary Micro-pump etc. at present.Having realized business-like is mainly electric osmose Micropump, but electric osmose Micropump can only aspirate the solution that electric conductivity is lower, and needs higher driving voltage.The processing of the moistening Micropump of electricity, bubble Micropump is comparatively complicated, and cost is higher.The flow that Capillary Micro-pump produces is less, is only applicable to the sample analysis of denier.Magneto fluid mechanics is research conducting liquid and the interactional subject of electromagnetic field.At first, in plasma physics research field, magneto fluid mechanics is widely used in suction and controls metal liquid.Magneto fluid mechanics Micropump utilizes Lorentz force as suction mechanism.Than other non-mechanism Micropump, magneto fluid mechanics Micropump has that driving voltage is less, course of working is simple, realize the bi-directional drive of liquid, can be used in the moderate conducting liquid of suction, can produce continuous flowing, can be used for aspirating biological sample, and can carry out the advantages such as integrated with other microfluidic devices, can be widely used in the fields such as chemical field, biologic applications field, microelectronic be cooling.Magneto fluid mechanics Micropump can be divided into once-through type and two kinds of modes of AC type, and once-through type structure exists the electrolysis problem of electrolyte solution and the degradation problem of electrode.Due to the existence of Electrolysis, make a large amount of bubbles of generation in passage, thereby increased liquid flowing resistance.In addition, the degraded of electrode reduces the working life of once-through type magneto fluid mechanics Micropump.Current improving one's methods is to adopt oxidation-reduction type solution as electrolyte solution, thereby realizes reversible electrochemical reaction at electrode position.Yet this method needs the redox electrolytes matter solution of high concentration, thereby the detection of later stage sample is produced to larger interference.The magneto fluid mechanics Micropump of employing exchange way can effectively solve the problem of electrolysis and electrode degrading.By electrode and electromagnet are applied to alternating voltage simultaneously, realize the directional flow of fluid.
Magneto fluid mechanics Micropump is all generally directly to install and make electromagnet structure in micro passage bottom, thereby makes in passage, to have stronger magnetic intensity.The electromagnet structure of existing magneto fluid mechanics Micropump is all to adopt 3 D electromagnetic iron conventionally, and 3 D electromagnetic iron volume is larger, this just makes magneto fluid mechanics Micropump size larger, be not easy to realize microminiaturized, cannot with portable integrated chip, and 3 D electromagnetic ironworking is complicated, also makes the processing and fabricating cost of magneto fluid mechanics Micropump higher.
Summary of the invention
Technical problem to be solved by this invention be to provide a kind of size less, can with the magneto fluid mechanics Micropump of portable integrated chip.
The present invention solves the problems of the technologies described above adopted technological scheme: this magneto fluid mechanics Micropump, comprise substrate, the lower surface of described substrate is provided with plane electromagnetic iron, the upper surface of described substrate is provided with matrix, the liquid storage tank that is etched with micro passage on described matrix and is communicated with micro passage, both sides in micro passage are provided with electrode, described electrode sputters at the upper surface of matrix, also comprise for by the encapsulated layer of micro passage sealing, on described encapsulated layer, be provided with for liquid being injected to spout and the electrode access hole of liquid storage tank.
Further, at the lower surface of substrate, plane magnet coil is set and forms described plane electromagnetic iron.
Be further, the lower surface of described substrate deposits isolation layer, on described isolation layer, has through hole, and described through hole is positioned at the center of plane magnet coil, described isolation layer upper surface deposits magnetic yoke structure, and described magnetic yoke structure electrically contacts at the center of described through hole and plane magnet coil.
Further, the upper surface deposited nickel layer at isolation layer forms described magnetic yoke structure.
Further, described isolation layer adopts silica to make.
Further, described encapsulated layer adopts dimethyl silicone polymer to make.
Further, the thickness of described encapsulated layer is 10~40 μ m.
Further, between described electrode and the upper surface of matrix, deposit titanium layer.
Further, described matrix adopting SU-8 optical resist is made.
Further, described electrode is gold electrode.
Beneficial effect of the present invention: this magneto fluid mechanics Micropump is owing to adopting plane electromagnetic iron to produce magnetic field, replaced existing 3 D electromagnetic iron as magnetic field sources, thereby make the size of the magneto fluid mechanics Micropump made less, more easily realize microminiaturized, can with portable integrated chip, and, the processing of plane electromagnetic iron is more simple, reduced the processing and fabricating cost of magneto fluid mechanics Micropump, in addition, electrode of the present invention is arranged on the both sides of micro passage, and perpendicular to channel bottom, make to form between two electrodes uniform electric field, thereby the Lorentz force that electric field and magnetic field interaction produce points to the length direction of micro passage, reduced to the utmost the flow disturbance that the dispersion due to Lorentz force direction causes, thereby possesses good pumping efficiency.
Accompanying drawing explanation
Fig. 1 is the three-dimensional structure schematic diagram of magneto fluid mechanics Micropump of the present invention;
Fig. 2 is the electrode structure schematic diagram of magneto fluid mechanics Micropump of the present invention;
Fig. 3 is the base structure schematic diagram of magneto fluid mechanics Micropump of the present invention;
Fig. 4 is the encapsulation layer structure schematic diagram of magneto fluid mechanics Micropump of the present invention;
Fig. 5 is the plane magnet coil structural representation of magneto fluid mechanics Micropump of the present invention;
Fig. 6 is the magnetic yoke structure schematic diagram of magneto fluid mechanics Micropump of the present invention;
Description of symbols in figure: substrate 1, matrix 2, micro passage 3, liquid storage tank 4, electrode 5, encapsulated layer 6, spout 7, electrode access hole 8, plane magnet coil 9, through hole 10, magnetic yoke structure 11.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is further described.
As shown in Figures 1 to 6, this magneto fluid mechanics Micropump, comprise substrate 1, the lower surface of described substrate 1 is provided with plane electromagnetic iron, the upper surface of described substrate 1 is provided with matrix 2, the liquid storage tank 4 that is etched with micro passage 3 on described matrix 2 and is communicated with micro passage 3, in micro passage, 3 both sides are provided with electrode 5, described electrode 5 sputters at the upper surface of matrix 2, also comprise for by the encapsulated layer 6 of micro passage 3 sealings, on described encapsulated layer 6, be provided with for liquid being injected to spout 7 and the electrode access hole 8 of liquid storage tank 4.This magneto fluid mechanics Micropump is owing to adopting plane electromagnetic iron to produce magnetic field, replaced existing 3 D electromagnetic iron as magnetic field sources, thereby make the size of the magneto fluid mechanics Micropump made less, more easily realize microminiaturized, can with portable integrated chip, and, the processing of plane electromagnetic iron is more simple, reduced the processing and fabricating cost of magneto fluid mechanics Micropump, in addition, electrode 5 of the present invention is arranged on the both sides of micro passage 3, and perpendicular to channel bottom, make 5, two electrode form uniform electric field, thereby the Lorentz force that electric field and magnetic field interaction produce points to the length direction of micro passage 3, reduced to the utmost the flow disturbance that the dispersion due to Lorentz force direction causes, thereby possesses good pumping efficiency.
For the ease of processing and fabricating plane electromagnetic iron, as preferred mode, be that lower surface in substrate 1 arranges plane magnet coil 9 and forms described plane electromagnetic iron, the arrangement of described plane magnet coil 9 is matrix and arranges, and the constant dimension of plane magnet coil 9, described plane magnet coil 9 can adopt ferromagnetic substance to make, and also can consist of copper coil or silver-colored coil.
Be further, the lower surface of described substrate 1 deposits isolation layer, on described isolation layer, have through hole 10, described through hole 10 is positioned at the center of plane magnet coil 9, described isolation layer upper surface deposits magnetic yoke structure 11, and described magnetic yoke structure 11 electrically contacts at the center of described through hole 10 places and plane magnet coil 9.By magnetic yoke structure 11 is set, can strengthen the magnetic intensity of plane magnet coil 9, further increase the Lorentz force that electric field and magnetic field interaction produce, thereby increase the suction capactity of magneto fluid mechanics Micropump.
In order to make magnetic yoke structure 11 can strengthen to greatest extent the magnetic intensity of plane magnet coil 9, upper surface deposited nickel layer at isolation layer forms described magnetic yoke structure 11, nickel is Paramagnetic material, its relative permeability is 600, can strengthen to greatest extent the magnetic intensity that plane magnet coil 9 produces, nickel dam is deposited on the upper surface of isolation layer by the method for magnetron sputtering.
Described isolation layer can adopt existing various insulating material to make, and in order to guarantee good insulation effect, described isolation layer adopts silica or optical resist to make.
Described encapsulated layer 6 adopts dimethyl silicone polymer to make, adopt polydimethylsiloxane to seal micro passage 3, than glass, the hardness of polydimethylsiloxane is lower, there is good mechanical flexibility, when what polydimethylsiloxane was under pressure, do the used time, due to its good pliability, can carry out complete sealing to micro passage 3, there is not dead space, thereby guarantee good sealing effect, in addition, polydimethylsiloxane has good transmittance to light, therefore facilitate the endocorpuscular detection of passage, the monitoring of liquid flow condition.PDMS prepolymer and curing agent mix with the ratio of 10:1, PDMS mixture is carried out to early stage to be processed, need fully to remove the gas in mixed solvent, in the mode of spin coating, on chip glass surface, make PDMS thin layer, after solidifying, by punching on thin layer, produce spout 7 and electrode access hole 8, and PDMS is carried out to oxygen plasma treatment 70W, 75mtorr, 10s, makes surface for hydrophily.
Under the prerequisite of the good sealing effect of assurance, reduce costs to greatest extent, the thickness of described encapsulated layer 6 is preferably 10~40 μ m.
For the stickiness between intensifier electrode and matrix 2, between described electrode and the upper surface of matrix 2, deposit titanium layer, the thickness of described titanium layer is about 10nm.
For the ease of processing micro passage 3, simplify micro-work flow, described matrix 2 adopts SU-8 optical resist to make, because SU-8 optical resist has good mechanical property and chemical stability, can be directly as structural material, thereby simplify micro-work flow, only need be in substrate 1 when making spin coating adhesive, spin coating SU-8 optical resist again, carry out the exposure imaging process of specific pattern, obtain micro passage 3 structures and can complete the processing and fabricating of micro passage 3, described micro passage 3 has level and smooth loop configuration, the interference of the flow-speed measurement that has reduced the poor existence of external pressure and caused.
In addition, described electrode 5 can adopt platinum electrode, aluminium electrode etc., as preferably: described electrode 5 is gold electrode.Described gold electrode is made in the following way, first with the thick gold layer of the about 200nm of method sputtering sedimentation one deck of magnetron sputtering, then by the method for aligning, photoetching, gold layer is carried out to graphic making, comprise electrode structure and pin configuration, thus the side-wall electrode that obtains electric property, has good uniformity.

Claims (10)

1. magneto fluid mechanics Micropump, it is characterized in that: comprise substrate (1), the lower surface of described substrate (1) is provided with plane electromagnetic iron, the upper surface of described substrate (1) is provided with matrix (2), the liquid storage tank (4) that is etched with micro passage (3) on described matrix (2) and is communicated with micro passage (3), in micro passage, the both sides of (3) are provided with electrode (5), described electrode (5) sputters at the upper surface of matrix (2), also comprise the encapsulated layer (6) for micro passage (3) are sealed, on described encapsulated layer (6), be provided with for liquid being injected to spout (7) and the electrode access hole (8) of liquid storage tank (4).
2. magneto fluid mechanics Micropump as claimed in claim 1, is characterized in that: the lower surface in substrate (1) arranges the described plane electromagnetic iron of plane magnet coil (9) formation.
3. magneto fluid mechanics Micropump as claimed in claim 2, it is characterized in that: the lower surface of described substrate (1) deposits isolation layer, on described isolation layer, have through hole (10), described through hole (10) is positioned at the center of plane magnet coil (9), described isolation layer upper surface deposits magnetic yoke structure (11), and described magnetic yoke structure (11) is located to electrically contact with the center of plane magnet coil (9) at described through hole (10).
4. magneto fluid mechanics Micropump as claimed in claim 3, is characterized in that: the upper surface deposited nickel layer at isolation layer forms described magnetic yoke structure (11).
5. magneto fluid mechanics Micropump as claimed in claim 4, is characterized in that: described isolation layer adopts silica to make.
6. according to the magneto fluid mechanics Micropump described in any one claim in claim 1 to 5, it is characterized in that: described encapsulated layer (6) adopts dimethyl silicone polymer to make.
7. magneto fluid mechanics Micropump as claimed in claim 6, is characterized in that: the thickness of described encapsulated layer (6) is 10~40 μ m.
8. magneto fluid mechanics Micropump as claimed in claim 7, is characterized in that: between described electrode (5) and the upper surface of matrix (2), deposit titanium layer.
9. magneto fluid mechanics Micropump as claimed in claim 8, is characterized in that: described matrix (2) adopts SU-8 optical resist to make.
10. magneto fluid mechanics Micropump as claimed in claim 9, is characterized in that: described electrode (5) is gold electrode.
CN201310597265.XA 2013-11-21 2013-11-21 Magnetohydrodynamic micropump Active CN103573576B (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103864000A (en) * 2014-02-28 2014-06-18 西南交通大学 Mini electric conjugate fluid pump
CN107155285A (en) * 2017-06-30 2017-09-12 哈尔滨工业大学 Temprature control method of the electronic equipment internal based on microchannel heat-transfer character
CN110752110A (en) * 2019-10-09 2020-02-04 南京理工大学 Microfluid inertia power connection switch capable of realizing bidirectional identification
CN112892619A (en) * 2019-12-04 2021-06-04 香港城市大学深圳研究院 PDMS master model with arc-shaped edge section, micro-fluidic valve and chip and preparation thereof
CN113833634A (en) * 2021-09-01 2021-12-24 北京航空航天大学 Electromagnetic drive type MEMS micropump and integrated processing technology thereof
CN115263714A (en) * 2022-08-04 2022-11-01 浙江大学 Micropump device for driving micro gear by surface acoustic wave

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US6146103A (en) * 1998-10-09 2000-11-14 The Regents Of The University Of California Micromachined magnetohydrodynamic actuators and sensors
CN1540163A (en) * 2003-11-01 2004-10-27 浙江大学 Magnetic fluid impulse type minipump
CN2654899Y (en) * 2003-11-06 2004-11-10 浙江大学 Mini-electromagnetic pump
TWM255335U (en) * 2003-12-23 2005-01-11 Chung Shan Inst Of Science Magnetohydrodynamic micropump with comb drive type electrode
US7672129B1 (en) * 2006-09-19 2010-03-02 Sun Microsystems, Inc. Intelligent microchannel cooling

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6146103A (en) * 1998-10-09 2000-11-14 The Regents Of The University Of California Micromachined magnetohydrodynamic actuators and sensors
CN1540163A (en) * 2003-11-01 2004-10-27 浙江大学 Magnetic fluid impulse type minipump
CN2654899Y (en) * 2003-11-06 2004-11-10 浙江大学 Mini-electromagnetic pump
TWM255335U (en) * 2003-12-23 2005-01-11 Chung Shan Inst Of Science Magnetohydrodynamic micropump with comb drive type electrode
US7672129B1 (en) * 2006-09-19 2010-03-02 Sun Microsystems, Inc. Intelligent microchannel cooling

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103864000A (en) * 2014-02-28 2014-06-18 西南交通大学 Mini electric conjugate fluid pump
CN103864000B (en) * 2014-02-28 2016-02-03 西南交通大学 A kind of electric conjugation fluidic micropumps
CN107155285A (en) * 2017-06-30 2017-09-12 哈尔滨工业大学 Temprature control method of the electronic equipment internal based on microchannel heat-transfer character
CN110752110A (en) * 2019-10-09 2020-02-04 南京理工大学 Microfluid inertia power connection switch capable of realizing bidirectional identification
CN112892619A (en) * 2019-12-04 2021-06-04 香港城市大学深圳研究院 PDMS master model with arc-shaped edge section, micro-fluidic valve and chip and preparation thereof
CN112892619B (en) * 2019-12-04 2022-07-15 香港城市大学深圳研究院 PDMS (polydimethylsiloxane) master mold with arc-shaped edge section, micro-fluidic valve and chip and preparation thereof
CN113833634A (en) * 2021-09-01 2021-12-24 北京航空航天大学 Electromagnetic drive type MEMS micropump and integrated processing technology thereof
CN115263714A (en) * 2022-08-04 2022-11-01 浙江大学 Micropump device for driving micro gear by surface acoustic wave
CN115263714B (en) * 2022-08-04 2024-02-09 浙江大学 Micropump device for driving micro gear by acoustic surface wave

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